5 Port Solenoid Valve Series VQZ1000/2000/3000

16.5 15 R1 5 3 R2 1 P X (Pitch) P = 10.5 16.1 57 32.8 M5 x 0.8 [4(A), 2(B) port] A 33.5 20.5 6.5 20 6 4 B 2 External pilot 3.2 (Pitch) P = 10.5 14.5 M5 The dashed lines indicate the DIN rail mounting [-D].

5 Port Solenoid Valve

L1 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B) port side:Yellow Light/surge voltage suppressor DIN rail B A A 14 A B A 14 A B 14 A B A 14 A B A A 14 (114.8) 97.5 113.4 116.7 101 1.4 81.2 5.5 B 12 B 12 B 12 B 12 B 12 10.9 34.2 L2 1.5 4 x M5 mounting hole [Communication connector D-sub] (Station n) (Station 1)-(Slide locking manual override) BUS OUT BUS 78.9 (12.9) 76.7

Vacuum Module Series ZX

Filter JIS Symbol 32 41 51 2 x R1.8 1 10 8.8 (Mounting hole) 3.6 19 4.8 (Mounting hole) Filter M5 (or M6) IN port M5 (or M6) OUT port 2 x 3.5 (Mounting hole) (62) 58 50 8 OUT IN 18 15.5 4 11 20 4.2 6.8 11 8.8 Bracket A (Standard accessory) Note) Dimensions : For A mounting bracket. Filter case About this product Caution The filter mounted on the product is a simplified one.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 12 12 15 5 6 1.7 21 29.9 46 3 ZPR13UT 13 14 ZPR13 13 1.8 1.5 ZPR16UT 16 17 ZPR16 16 18 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

AIRLINE EQUIPMENT, AF MASS PRO, AA, AF MASS PRO M5 MODULAR (PT), 0.63137 lb

Options include a mounting bracket and set nuts for panel mounting, and a pressure gauge.? The modular design of the AR series connects with other SMC air preparation equipment., REGULATOR, MODULAR, M5, AIRLINE EQUIPMENT, AR MASS PRO, AA, AR MASS PRO M5 MODULAR (PT), 2.39253 lb

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VR VH VHS Pilot port (A side) 2-M5 x 0.8 sub-plate side (P , A, B port) (R1, R2 port) 2 position double: VZA4241--01 02 Pilot port (B side) Body side Pilot port (A side) 2-M5 x 0.8 body side 2-4.5 Mounting hole Pilot port (A side) 2-M5 x 0.8 sub-plate side (R1, R2 port) (P , A, B port) Pilot port (B side) Sub-plate side 5-3-7 8 Series VZA4000 Dimensions: Base Mounted 3 position closed center

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

ZX

(or M6) (PD port) External release port plug Note 1) ZQ 2-3.3 mounting hole M5 (or M6) Vacuum pad connection port M5 (or M6) (P port) Air supply pressure port 63.5 58 ZF 10.2 ZP 18 4 15.5 ZCU 4.5 Bracket A (Standard accessory) AMJ Note 2) Dimensions : For mounting bracket A : For mounting spacer 1.

VM

MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM122-M5-00 VM132-M5-00 37.5 VA 1.5 mm O.T. 3.5 VM123-M5-00 VM133-M5-00 2-4.6 mounting hole 33.5 3.0 mm T.T.

Mechanically Jointed Rodless Cylinder Series MY1

plug) G G GB Cushion needle M5 x 0.8 (Hexagon socket head plug) N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 2 x 2 x J depth K (Hexagon socket head plug) (WW) (WW) M5 x 0.8 XX XX (Hexagon socket head plug) M5 x 0.8 (Port) VV VV 2 x M5 x 0.8 2 x M5 x 0.8 MY1MG MY1MG (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C G GA GB H K J LD L LH LL LW MM N Model M NH NC NE NW PA 80 6 3.5

0.4

X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 one-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3

Free Mount Cylinder Series CU

A 2 x P through KA B 4 x T counterbore Width across flats L S + Stroke CUJ Z + Stroke CU CQS CQ2 RQ (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB CQM 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 12 15.5 19.5 14 18 22 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 8 10 12 M5 x 0.8 M5 x 0.8 1/8 MU Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5

SX

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Specify a option model with 9 to 16 stations by using a manifold specification form.) Manifold Specifications Porting specifications Applicable stations Port size Port location Series P, R A, B C6 Side C3, C4, M5 Max.16 Max.16 VQ0 C8 Side C3, C4, C6, M5 VQ1000 SB applicable to MELSECNET/MINI-S3 Data Link (Mitsubishi Electric Corp.)

SQ1000/2000

A A B A B A B A B A B A B 103.3 (131.5) A 4 SMC 47.5 56 37.6 53.6 B 2 18.5 Approx. 12 Approx. 12 M5: External pilot port EXH outlet D side U side Stations 1 2 3 4 5 6 7 8 n C10: EXH port Lead wire length: L0, approx. 600mm L1, approx. 1500mm L2, approx. 3000mm C10: SUP port For top ported Approx. 10 R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62 41.5 25.5 39.5 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B

Rotary Actuator/Vane Type

5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 x 0.8 14 24 25 40 63 45 31 30 100.005 0.020 25 0 0.052 6.5 20 1.0 31 20 56 M5 x 0.8 depth 10 M5 x 0.8 17 30 31 59 A CDRB2 Series Dimensions: Standard Type (With Auto Switch) 10 Double vane Following figures show the intermediate rotation position when A or B port is pressurized.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2.5 3 SB 8 8 9.5 11 11 VB 4 4 5 6 6 O 4.5 4.5 5 5.5 6 SA 4.2 4.2 5.1 6.6 6.6 UB 10 10 12 16 16 R 44 52 63 78 98 TB 8 8 10 10 12 WA YB 8 8 10 12 12 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074

Table of Contents

2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M