/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 1/4-20UNC-2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 5/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8 2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 7/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3 3/4 4 4 1/4 4 1/2 4 3/4 5 1/4 5 3/4 6 1/4 6 3/4 1/4-20UNC-2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 7/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/
B A 3-position closed center Note) Only rubber seal type 2(B) (A)4 3 Seal type D: Slide locking type (Manual) (R1)5 1 (P) 3(R2) 0 Metal seal 1 Rubber seal 3-position exhaust center 2(B) (A)4 4 (R1)5 1 (P) 3(R2) 3-position pressure center 2(B) (A)4 5 (R1)5 1 (P) 3(R2) 52 Series VQC1000 Dimensions Power supply with M12 connector (5.25) L1 L2 (Rail mounting hole pitch: 12.5) L4 5.5 L7 28 L6
Note 3) Stainless steel rod standard on 3/4" and 7/8".
cooled type) . 2-3 2.2.2 HRR012/018/024/030-W-10/20-U(Water cooled type) . 2-4 2.3 Function of Parts . 2-5 2.4 Operation display panel . 2-6 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3
2.2.2 HRR010-W-10/20. 2-6 2.3 Function of Parts . 2-7 2.4 Operation display panel . 2-8 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-
center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C.
D side Stations 1 2 3 4 5 6 7 8 9 10 11 12 Description/Model (A) 4 (B) 2 2 position single 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 2 position double 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position closed center Valves Options Port size (ports A, B) Enter in case of mixed sizes (CM). 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position exhaust center 1 (P)3 (R2) 5 (R1) (A) 4 (B) 2 3 position pressure center 1 (P)3
P/N 3/8 B5 x 2 3/8 B5 x 3 3/8 B5 x 4 3/8 B3 x 2 #2 1/2 Barb P/N 3/8 B2 1/2 x 2 3/8 B2 1/2 x 3 3/8 B2 1/2 x 4 3/8 B2 1/2 x 5 3/8 B2 1/2 x 6 3/8 B2 1/2 x 7 #3 Barb P/N 3/8 B3 x 2 3/8 B3 x 3 3/8 B3 x 4 3/8 B3 x 5 3/8 B3 x 6 #4 Barb P/N 3/8 B4 x 2 3/8 B4 x 3 3/8 B4 x 4 3/8 B4 x 5 Thread Size 1 Barb # (Size) Quantity of Barbs Part Numbering Example 52 Available with #1, #2, #2
: Wiring specifications 3 1 14 port side SOL Pin no. 1: Open 2: 12 port side SOL (+) 3: COM (-) 4: 14 port side SOL (+) 5: Ground 1 (P) 5 (R1) 3 (R2) ZNR 2 2 4 5 DC: Single COM 3 3 12 port side SOL 14 port side SOL ZNR ZNR 4 2 DC: Double 3-11-5 6 Series EVS7Dimensions EVS7-6-FG-S-M0 141 141 89 52 89 50 50 42.5 42.5 2-6.5 mounting hole 13 (4 port) 13 (2 port) 25 25 3/8-2 port 3, 5 port 1
cooled type) . 2-4 2.3 Function of Parts . 2-5 2.4 Operation display panel . 2-6 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-10 3.3.4
A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield (3) Cable color Terminal No.
2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8
2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8
2 8 A Stacking type 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" 02 2 stations 3 3 12 1/2" 12 1/2" 05 5 stations 12 1/2" LQ2 integral fitting 12 1/2" 4 4 19, 3/4" 19, 3/4" How to Order Valve LVH 2 0 07 A S Body class Symbol 2 3 4 Body class 2 3 4 Orifice dia.
4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment
. 32 (3) Example circuit 3 Motor power shutdown . 33 7.
m 3 m 3 m 3 m Option 500 Note) This product is for overseas use only according to the new Measurement Law.
Setting Data Entry . 48 9.1 Profile parameter . 48 9.2 Basic parameter . 49 9.3 Return to origin parameter . 51 9.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10.
Note 3) 3/16" and 3/8 are made of POM, stainless steel, and brass (electroless nickel plated). Note 4) 3/16" and 3/8 are are made of brass (electroless nickel plated).