3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

Magnetically Coupled Rodless Cylinder

Specifications Specifications Bore size CY3B Bore size CY3B Applicable series Applicable series 15 to 40 15 to 40 Construction Construction CY3B CY3B Special bearing Special bearing Dust seal (felt) 22 Series CY3B/CY3R Made to Order Specifications 3 Contact SMC for detailed specifications, lead times and prices.

Dedicated Controller

Therefore, never connect it to other equipment as this may cause fire or malfunction. 86 15 Regenerative Absorption Unit Series LC7R Dimensions 52 97 35 38 96 Operation window Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 35 Label DIN rail holding plate 22 22 Connector

S070

5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 7 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G-32 Grommet type R1.1 2 7 7.2 V100 R1.1 Mounting screw (AXT632-106A-2)

VFR

Lead wire color Dot marking Orange Orange Yes Black Black Yes Green Green Yes Yellow Yellow Yes Brown Black Brown Orange Yellow Purple White White Red Yellow Red Black White Black 14 15 Pink 16 Blue 17 20 Red 21 22 Pink Red 23 Gray Red 24 25 18 Gray 19 13 14 15 17 Pink 19 Gray 21 23 16 18 Pink Yes 20 Gray Yes 22 24 Terminal no. Lead wire color Dot marking Terminal no.

VM

One way roller lever VM220-02-02 VM230-02-02 VM220-02-02S VM230-02-02S JIS Symbol 2 port 17 polyacetal or hard steel roller 3 port EXH port (3 port only) 0.5 MPa supply 7.0 mm P.T. 22 N F.O.F. 5.0 mm O.T. 2-5.5 mounting hole 12.0 mm T.T.

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Specifications Specifications Bore size CY3B Bore size CY3B Applicable series Applicable series 15 to 40 15 to 40 Construction Construction CY3B CY3B Special bearing Special bearing Dust seal (felt) 22 Series CY3B/CY3R Made to Order Specifications 3 Contact P/A for detailed specifications, lead times and prices.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 2522 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50

Parallel Type Air Gripper Series MHZ

Kit includes items 21, 22, 23 and 24 from the table above. MHZA6-PS Seal kits consist of items 21, 22, 23 and 24 in one kit, and can be ordered using the seal kit number.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Self-seal Fittings Series KC

M1 L M2 D 4 KCH04-00 KCH06-00 KCH08-00 KCH10-00 KCH12-00 42.1 45.8 52.8 59.8 63.5 10.4 12.8 15.2 18.5 20.9 2.6 6.8 16.2 25.6 35.4 18 19 21.5 24 25.5 16 17 18.5 21 22 2.6 6.8 13.1 20.4 30.4 5 8 11 18 24 6 8 10 12 Note) D: max. diameter Straight plug for frequent use: KCH Applicable tube O.D.

3 Port Solenoid Valve SYJ300/500/700 Series

Specifications Applicable model Base mounted type (SYJ714R,SYJ724R) 30inHg~100(--100kPa~0.7) 22~100(0.15~0.7) External pilot pressure Main pressure Operating pressure range PSI(MPa) Note) Externally piloted body ported valves(SYJ7 2R) can only be used on the manifold.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

AC Servo Motor Driver (Pulse input type)

(Note 2) Alarm deactivation Display Name Alarm code AL.92 Battery cable Press disconnection warning Display CN1 CN1 CN1 Name "SET" on Alarm AL.96 Home position setting Power 22 23 24 current reset error OFF ON (bit2) (bit1) (bit0) alarm (RES) AL.99 Stroke limit warning screen.

AC Servo Motor Driver (SSCNET /H Type)

When the logic of FLS and RLS is set to "positive logic" using Pr.22, Input signal logic selection", positioning control can be performed, even if FLS and RLS are not wired. -58- 7.4 Operating conditions The following conditions must be satisfied in order to start operation.

ZQ-OM01601

,ONOFF ON-OFF ON (22 -) "digit" 0 () SI ONOFF ON 12 - ON (22 -) (OUT1) "" 22 5R.D.(5) () "()" () F () 13 - ,FG 14 - NPN NPN 2 26.4V 80mA 2 V NPN (ZQ1-LW6-N-A) PNP PNP 2 80 mA2 V PNP (ZQ1-LW6-P-A) 15 - 133 1 1 1 1 16 - OUT1 (P_1),ON (P_1)(H_1)OFF P_1-70.0 kPa H_1:10.0 kPa OUT2 OUT2ON (P_1)OFF ((P_1)(H_2)),ON ONOFF H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (

ZSE40/ISE40

Time Repeatability 0.2% F .S. 1 digit or less IP65 compatible Dusttight/Splash proof type 16-2-16 3 Series ZSE40/ISE40 High Precision, Digital Pressure Switch How to Order 0.100 to 1.000 MPa For positive pressure Set pressure range Nil ISE40 01 22 For positive pressure ZSE ISE ZSE40 01 22 For vacuum/compound pressure PSE Z I SE3 PS Option Set pressure range Nil F Nil For vacuum pressure

VCB

1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5