/

/60 Hz 15.4 155 (6.5) 1 200 VAC 50/60 Hz 56 (2.3) 9.4 50 (2.1) 3/8 11 110 VAC [115 VAC] 50/60 Hz 73 (3.0) 10.5 55 (2.3) 1/2 3 MPa 15 12 90 (3.8) 92 (3.8) 220 VAC [230 VAC] 50/60 Hz 3/4 15.2 135 (5.6) 140 (5.8) 17 24 VDC 1 3-port 23 (1.0) 6 26 (1.1) 7.5 3/8 12 VDC 49 (2.0) 10.1 7.6 45 (1.9) 1/2 7 MPa 12.8 10 78 (3.3) 65 (2.7) 3/4 11.5 102 (4.3) 84 (3.5) 15.4 1 Bracket Electrical entry T:

pa

50 SUP = 0.5 MPa VC SUP = 0.5 MPa 40 40 VDW Air consumption 100 l/min (ANR) Air consumption 200 l/min (ANR) 30 30 Air consumption 100 l/min (ANR) Air consumption 50 l/min (ANR) VQ 20 SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Rotary Actuator/Vane Type

5 0.004 0.016 12 0 0.043 1.5 6 10 0.5 19 10 18.5 M3 x 0.5 3.5 3.5 M3 x 0.5 12.6 3 21 35 36 29 21 48 20 42 34.5 51 20 6 0.004 0.016 14 0 0.043 1.5 8 10 0.5 25.5 13 25 M4 x 0.7 4.5 4.5 M5 x 0.8 16 4 22 44 36 26 59 30 50 47.5 55.5 22 8 0.005 0.020 16 0 0.043 2 9 12 1.0 33.5 14 25 M5 x 0.8 5.5 5.5 M5 x 0.8 21.5 4.5 24 52 42 29 69 40 63 53 62.2 30 10 0.005 0.020 25 0 0.052 3 10 20 39 20 31

LA-OMP0023

10 20 30 40 50 0 10 20 30 40 50 Pushing Position [mm] Pushing Position [mm] Operating conditions: Operating conditions: Mounting orientation: Mounting orientation: Horizontal table mounting.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-04 FH540-06 FH540-08 FH540-10 FH540-12 10 3/8 3/8 10 FH541-04 FH541-06 FH541-08 FH541-10 FH541-12 FH541-16 15 (1/2B) 20 1/2 1/2 20 20 (3/4B) 20 (3/4B) 50 3/4 3/4 50 Max. 14 MPa Max. 3.5 MPa 25 (1B) 25 (1B) 80 1 1 80 FH341-10 FH341-12 FH341-16 32 (1 1/4B) 32 (1 1/4B) 120 1 1/4 1 1/4 120 40 (1 1/2B) 40 (1 1/2B) 160 1 1/2 1 1/2 160 50 (2B) 50 (2B) 260 260 FH440-03 FH440-04 FH440-

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

A_HEC-OM-K001

fluid Pressure loss (HED005/007) 9.5 Performance Chart 9-17 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.5.5 Facility water Pressure Loss Fluid: Water HED003 60 50 Pressure loss kPa HED003-HW13 HED003-HW19 40 30 20 10 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate L/min Fig.9-15 Facility water Pressure Loss (HED003) HED005, HED007 60 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 50 Pressure loss kPa 40

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Digital Flow Switch (Integrated display type)

Max. 1 NL/min 10 NL/min PF2A710 3.5 CFM x 10-2 35.0 CFM x 10-2 5 NL/min 50 NL/min PF2A750 18 CFM x 10-2 176 CFM x 10-2 10 NL/min 100 NL/min PF2A711 3.5 CFM x 10-1 35.5 CFM x 10-1 20 NL/min 200 NL/min PF2A721 7 CFM x 10-1 71 CFM x 10-1 50 NL/min 500 NL/min PF2A751 18 CFM x 10-1 176 CFM x 10-1 : Analogue output is based on the rated flow range at normal condition.

ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

IDX-OM-W011

0.235 0.37 0.57 0.82 1.32 1.82 3.1 0.7MPa 35 32 10 550 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 (2) A AC200V 50/60Hz 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 3.4/3.1 (2) W AC100V,AC200V 50/60Hz 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420

IP8101 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 12 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

High Purity Chemical Valve

16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46