AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Port block assembly (cassette type) Port block assembly (screw-in type) How to Order Connector Assembly For DC : SY100-30-4AFor 100VAC : SY100-30-1AMounting screws For 200VAC : SY100-30-2AFor other AC : SY100-30-3AWithout lead wires : SY100-30-A (connector, socket x 2pcs. only) Lead wire length 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Nil 6 10 15 20 25 30 50 Fitting assembly

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

3

Maximum flow of rated flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Lubrication Equipment

Description Type Model ALB900-10 ALB900-20 ALB900-30 Bypass lubrication adapter AWD ALBA90-10 ALBA90-20 ALBA90-30 Standard attachment Ball valve B B IS440-1 to 2 1 4 ITV Ball valve 1 2 Oil can be replenished by merely opening and closing the oil filler plug without stopping the air line.

60

15 VXK2l2l 3 5 10 15 20 25 30 VXK2l3l 4.5 10 15 20 30 40 50 60 3 2 VXK 4l 6 30 60 3 2 VXK 50 8 25 30 Flow rate Q kg/h ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) How to read the graph The sonic range pressure to generate a flow rate of 15 kg/h is P1 0.15 MPa for 4.5 orifice (VXK2l3lS), P1 0.37 MPa for 3 orifice (VXK2l2lS), and P1 0.82 MPa for 2 orifice (VXK211lS

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

EXxx-OMY0004

-10 Block diagram of the EX245-FPS1 68 No.EX##-OMY0004 Fig. 10-11 Block diagram of the EX245-FPS2 Fig. 10-12 Block diagram of the EX245-FPS3 69 No.EX##-OMY0004 11.

VHK

8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

VHK

8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-10F 30.5 20.8 16.1 VHKl-12F-10F 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-12F-12F 31.5 21.8 17.5 3 port valve 1(P): Male thread, 2(A): One-touch fitting Bracket mounting dimension Tube O.D.

VHK

8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

Large Bore Compact Cylinder Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

Digital Pressure Switch ( compatible)

Problem Problem possible causes Investigation method Countermeasures Check that the power supply voltage is within the range 12 to 24 VDC 10%. Supply the correct voltage of 12 to 24 VDC 10%. Incorrect power supply Check the wiring to the power supply.

99

30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

PA3000/5000/PAX1000

Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

XLA Series

size 63 80 100 160 General use without XLA63-30-1 XLA80-30-1 XLA100-30-1 XLA160-30-1 with XLA63A-30-1 XLA80A-30-1 XLA100A-30-1 XLA160A-30-1 High temperature without XLA63-30-1H XLA80-30-1H XLA100-30-1H XLA160-30-1H with XLA63A-30-1H XLA80A-30-1H XLA100A-30-1H XLA160A-30-1H Note1) The magnet for auto switch is not provided.

Air Slide Table Series MXJ

) Table displacement amount (mm) Table displacement amount (mm) 0.06 MXJ8-20 MXJ8-15 MXJ8-20 MXJ8-15 MXJ8-15 MXJ8-15 0.08 0.05 0.15 MXJ8-10 MXJ8-10 MXJ8-5 MXJ8-5 -10 -15 -20 MXJ8-10 MXJ8-10 -10 -15 -20 0.04 0.06 MXJ8-5 MXJ8-5 0.10 MXJ8-5 MXJ8-5 0.03 0.04 0.02 0.05 0.02 0.01 0 20 40 60 0 10 30 50 70 5 10 15 20 25 30 0 20 10 30 50 70 40 60 Load (N) Load (N) Load (N) 176 Air Slide Table Series