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12VDC 110VAC 1W (Latching coil, com 5 6 3 Indicator light and surge voltage suppressor 1 2 3 Stations Uside Dside *Std valve is non-polar (+ or com) ** Contact P/A when ordering latching type valves mounted on a manifold. 3m How to Order Manifold VV3Q 1 1 08 C U 1 D X11 Plug-in Unit Manifold Series 1 VQ100 Manifold base type 1 Plug-in unit Stations Use only when ordering SI manifolds. 02

[January 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018-2022 SMC Corporation All Rights Reserved No.PS-OMW0002-C

Be careful not to bend or flatten the tube and the inner sleeve even if the value is more than the minimum bending radius. 2 Inner sleeve R How to Order IDK 02 100 Moisture control tube O.D.

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

Table C-1 Example of a checklist Checklist Device type/equipment identification EX260-FPS1 Version: HW/SW 01/1.1.1 Date 2017-July-1st Creator John Smith Test engineer Jane Brown System XXX has been checked for engine hood production Remark No. Requirement (mandatory) Yes Remark X No.

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMJ0018-F

PF-OMK0003CN-E Revision history E [September 2016] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2016 SMC Corporation All Rights Reserved No. PF-OMK0003CN-E

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMN0005-E

[March 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017-2022 SMC Corporation All Rights Reserved No.PF-OMU0007-D

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

Function selection mode ON OFF Front protective cover (Model: ZS-27-01) Connector Connecting / Disconnecting When mounting the connector, insert it straight into the socket, holding the lever and connector body, and push the connector until the lever hooks into the housing, and locks.

Outer dimensions 18 2 5/5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved 19

relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

Nm mm MHL2-10D M4X0.7 1.4 5 MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18 16 MHL2-40D M0X1.5 24 12 MHL2-40D M10X1.5 36 20 Nm MHL2-10D M4X0.7 2.1 MHL2-16D M5X0.8 4.3 MHL2-20D M6X1 7.3 MHL2-25D M8X1.25 17.7 6 - 1. 2. 2 <> AS1200-M5AS2200-01

/LEFS /P12,13 2.2 /LEFB BK RLS DC24V(+) /P40 6.6 2 /CN1 BK RLS DC24V(+) -43- No.LEF-OM00601 2012 10 UL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com -44-

When the controller is recognized correctly, indication other than "Offline" (01-***, etc.) is displayed on the starting screen as shown in the figure below. (2) Easy Mode The communication setting screen is displayed if the communication cannot be established. The operation will be available when the connection is confirmed after the communication setting.

RWwn+4553 ID1 ID7 RWwn+5462 ID1 ID8 RWwn+6371 ID1 ID9 RWwn+7280 ID1 ID10 RWwn+8189 ID1 ID11 RWwn+9098 ID1 ID12 RWwn+99107 ID1 1)12.1.1 2)0 12 38 - 12.1.1 8,16,32 8 8 ) RWwn+7 20mm/s100% 16 20mm/s 14h 10%100%1016 0Ah 0Ah 14h RWwn+7 15bi 8bit 7bit 0bit 16 16 (WORD) ) (RWwn+1)100mm/s 16 100mm/s 0064h 00 64 h 32 32 ) (RWwn+2,3)700.00mm 0.01mm 700.00mm 7016 00011170h 00 01

Memory map 12. 1 Memory assignment Gateway unit --> Higher level device [IN] Bit/Byte Value CorrespondModel/ Corresponding I_Address Data name Unit Size mode Ing ID No. range 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 00 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 ID1 All modes 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 01 4 AREA bit 0,1 5 WAREA bit 0,1