Installation Warning (1) Do not drop or apply impact during transportation or installation. It will cause damage to the product and result in operation failure. (2) Do not install in areas of high humidity or high temperature.
Do not place objects on top of the adsorption plate. Doing so may result in a reduction in flatness. 758
ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer
For materials of the flow control equipment, refer (2) When there is a large amount of to their construction drawings. condensate (2) Do not expose the product to direct sunlight Compressed air containing a large amount of for an extended period of time. condensate can cause malfunction of (3) Do not operate in a location subject to pneumatic equipment.
Do not put the heavy objects on the products. Do not use the products as scaffold. 2. Do not use the products in conditions that do not meet the product specifications. Product Returns When returning the product to SMC, make sure to properly purge to remove all hazardous materials and return the product complying with SMC specified procedures.
In the case of obtaining an accurate flow rate, refer to pages 16 to 20.
Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for
Do not apply excessive force or impact. This will not only damage the product but also decrease its performance and life expectancy. It is not possible to disassemble the bonnet assembly of this product. If the components and assembly are damaged, or damage is expected, exchange the bonnet assembly itself. Do not disassemble the parts that are not explained in this operation manual.
Do not use in an atmosphere where corrosive gases, chemicals, sea water, water, or water vapor is present. Do not use in cases where there is direct contact with any of the above. 2. Do not use in an explosive environment. 3. Do not use in a place subject to heavy vibration and/or impact. 4. The valve should not be exposed to prolonged sunlight. Use a protective cover if necessary. 5.
Do not use in an atmosphere where corrosive gases, chemicals, sea water, water, or water vapor is present. Do not use in cases where there is direct contact with any of the above. 2. Do not use in an explosive environment. 3. Do not use in a place subject to heavy vibration and/or impact. 4. The valve should not be exposed to prolonged sunlight. Use a protective cover if necessary. 5.
Do not apply excessive force or impact. This will not only damage the product but also decrease its performance and life expectancy. It is not possible to disassemble the bonnet assembly of this product. If the components and assembly are damaged, or damage is expected, exchange the bonnet assembly itself. Do not disassemble the parts that are not explained in this operation manual.
Please avoid excessive overwriting. (4) Do not cut the power while data is being saved.
Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .
Note1) To avoid the damage of O-ring and adjustment part, do not turn bypass valve adjusting bolt(13) farther than the point where turning is stopped at both ends. Note2) Do not apply pressure to the operation port during adjustment. Note3) Bypass valve is fully open at ex-factory.
Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.
Do not use the drain tube in an upward direction. Do not bend or crush the drain tube. (The auto drain will not be activated and water will try to escape via the air outlet.) If it is necessary that the tube goes upwards, make sure it only goes as far as the position of the auto drain.
Piping Caution Caution Handling 1.Do not inadvertently move the guide adjusting unit. The guide is installed at the proper tightening torque. Do not loosen the mounting bolts of the guide. 2.Do not operate the magnetic rodless cylinder if the magnet couplings on the actuator are displaced.
Do not ouch the electrode needle while energizing, or it may cause electric shock or accident. 3. Do not open the case to disassemble and reconstruct the product. It may cause electric shock, operation failure and disaster such as fire.
Do not use in an environment where flammable gas or explosive gas exists. Usage may cause a fire or explosion. The products do not have an explosion proof construction. 5. Do not use in a place subject to heavy vibration and/or shock. 6. The valve should not be exposed to prolonged sunlight. Use a protective cover. Note that the valve is not for outdoor use. 7.
Please consult with SMC for details. (1) Do not use in an environment where corrosive gases, chemicals, sea water, water or steam are present. (2) Do not use in explosive atmospheres. (3) Do not use in locations subject to vibration or impact. (4) Do not use in areas where product is exposed to heat sources or in areas where the product is exposed to radiant heat. (5) Employ suitable protective