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(process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 1000 L 0.25 0 L/min 2000 L 0.50 0 PF3A7#H 1000 L 0.0088275 0 cfm 2000 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF3A701H series, unit L/min, flow range 1000 L and PD = 2800) Pr =

2302) VNA (JIS B 6349) VNA 1 ISO VG32 VNA ( JIS K 6439) VNA VNA VNA VNA AS AS AS AS VNA AS 10A 111 420-03 3/8 B(9.5) 12 12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

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PB B A B A B A Symbol 2 3 4 6 5 N.C. N.O. Double acting Metric sizes N.O. Double acting Double acting 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 With flow rate adjustment PA N.C. B A N.C. Double acting With bypass PA PA N.C. PB B A B A Inch sizes Double acting 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C.

Air exhaust port (AIR EXH) Air supply port (AIR SUP) Discharge port (FLUID OUT) Pump chamber A Pump chamber B Check valve Actuating chamber B Suction port (FLUID IN) Diaphragm A Diaphragm B Actuating chamber A Actuating chamber A Actuating chamber A Actuating chamber B Actuating chamber B Discharge port Discharge port Pump chamber B Pump chamber B Pump chamber A Pump chamber A Suction port

Rc(PT) Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service

How to Order X15 AMG Body size Optional specifications Accessories Thread Port size Dimensions Model Connection A 240 260 300 380 B 256 300 349 496.5 B, FF, 10K 1B, FF, 10K AMG450 AMG550 AMG650 AMG850 3/4 1 1/2 B, FF, 10K 2B, FF, 10K 4.4-6

, 5, 6 Front nose mount (B) 12 32 32 40 Rear pivot mount (C) 40 Double end mount (E) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch. 2 Stainless Steel Body Cylinder Series NCM-A Dimensions ZB + STROKE A K W 0.50 2-ZD NE ZC MM E N KK UNF-2A N B -0.003 0.000 PILOT YC WA WB D ACROSS FLATS Y NN MOUNTING NUT Bore MM KK A B D E K N 075 (3/4") 0.250

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

PB B A B A B A N.C. N.O. Double acting Double acting With flow rate adjustment PA PA N.C. B A PB B A Double acting N.C. Double acting With bypass PA PA N.C. PB B A B A Double acting N.C. Double acting With flow rate adjustment & bypass PA PA N.C. PB B A B A Double acting N.C. Double acting 495

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 938 High Purity Fluoropolymer Needle Valve LVN Series Standard Specifications Model LVN20 LVN30 LVN40 4, 6 Tubing O.D.

F B With pressure at head side With pressure at rod side *Refer to p.5.3-2 for further information on the auto switch.

E: Emitter C: Collector B: Base B: Base Load Electrical appliance connected to the output, e.g. relay, solenoid, etc. E: Emitter C: Collector Fig.2 NPN type Fig.3 PNP type Operating humidity range Humidity range for proper operation of equipment. Load current Current flow through the electrical appliance once the output is energized.

b view 4 6 2 a 5 a 5 5 Component Parts No.

Tube insertions: a) Insert end of tubing into fitting until it bottoms. b) Pull on tubing to verify that it is properly retained. 2. Tubing disassembly: a) Be sure the air system pressure has been reduced to zero (0 psi) before attempting to remove the tubing. b) Simply push the tubing into the fitting c) Press and hold the release button against the body. d) Then remove the tubing. 3.