AR20-B to AR60-B mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with
Light/Surge voltage suppressor VZ None Nil Z S With light/surge voltage suppressor VS Rated voltage With surge voltage suppressor Not available for GZ, HZ and DOZ 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz VFN Electrical entry 4 Grommet L plug connector M plug connector DIN terminal 5 6 24 VDC 12 VDC MN: Without lead wire D: With connector L: With lead
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
Note 3) The handle of the selector (2 position and 3 position) cannot be removed or replaced alone. 5-6-12 11 2/3 Port Mechanical Valve Series VM100 How to Order S 01 01 3 1 VM1 Suffix for indicator light Suffix for actuator With miniature indicator light (Bottom piping type only) Actuator type R S Z G B Red Hard steel roller Port size Basic 00 Color of push button selector M5 01 M5 x 0.8
100 100 50 50 0 0 0 5 m/s m/s 19 4-3.
With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
110 -10 Pam 3/s A B C 0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.
U Connector type I 13 Connector auto switch 26 20 (22) D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M L B + Stroke A + Stroke E J S Note) This drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.
Z (Example) A80CZ 3 m . L (Example) A80CL None .
Operating direction: Right Operating direction: Left a b c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .
Z (Example) F9NWZ Bore sizes 32 to 100 Lead wire length (m) Auto switch type Type Special function Load voltage Indicator light Electrical entry Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) Electrical entry direction Applicable load DC AC Perpendicular Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV In-line Z76 Z73 Z80 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y7BA 3-wire (NPN equiv.)
(Example) Nil Lead wire length 0.5 m 3 m L 5 m Z None N Applicable for the connector type (D-C) only. Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-A73(C)(H)/A80C Solid state switch: Manufactured upon receipt of order as standard.
in X, Y, Z directions, 2 hours each 490m/s in X, Y, Z directions, 3 times each 290g (without lead wire) 250g (without lead wire) Equivalent to IP65 3/8 1/2 1/8, 1/4 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]
Z (Example) F8NZ Auto switches marked with u are produced upon receipt of order.
Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o P Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.
Note 1) At rated voltage 2.1-4 Series SY100 How to Order Light and surge voltage suppressor Standard (Cv0.008) Without light and surge voltage suppressor S Z R U With surge voltage suppressor With light and surge voltage suppressor With surge voltage suppressor (Non-polar-style) With light and surge voltage suppressor (Non-polar style) "S" type does not apply to AC model because rectifier
1090 2 -67No.PF-OMM0004-D (PVC ) PF3W711 PF3W721 (3 mPas(3 cP)) 1 10100 L/min 30250 L/min 7140 L/min(7 L/min 0) 20350 L/min(20 L/min 0) 7140 L/min 20350 L/min 1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300