Exhaust Cleaner for Clean Rooms AMP Series Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi
U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
: L/min; Accumulated Flow: L; Temp.: °C)
Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: B (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow: L
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.
Stations: 02 (2 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: S (w/Flow Adj.
Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
Stations: 02 (2 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.
Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.
Philadelphia, Athens, Greece HUNGARY (36) 23 513 000 Torbgy u. 15-19, 2045 Trkblint, Hungary IRELAND (353) 1 403 9000 2002 Citywest Road, Citywest Business Campus, Citywest, Dublin 24, Ireland ITALY (39) 02 92711 Via Garibaldi 62, 20061 Carugate, (Milano), Italy LATVIA (371) 781 77 00 Dzelzavas str. 120g, Riga, LV-1021, Latvia LITHUANIA (370) 5 264 81 26 Oslo g. 1, LT-04123 Vilnius, Lithuania
Air consumption(Note 4) [L/min(ANR)] 1.0 or less [Measuring conditions: supply pressure 1.0 MPa, set pressure 0.2 MPa] Ambient temp. and Fluid temperature [OC] Standard product: -5 to 60 With digital pressure switch: 0 to 50 (No freezing) Port size 1/4 Pressure gauge port size 1/8 [2 ports] Weight [kg] Note 5)0.23 (Note 1) When there is no flow rate on the outlet side.