CXS 10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM
, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.
A Water (Standard, Up to 60C) Air (Standard, Dry) Turbine oil Vacuum (Up to 1Torr) Carbon dioxide (CO2), Nitrogen gas (N2) Freon11, 113, 114 Steam Vacuum (Up to 10-3 Torr) Non-leak (10-5 atm cc/sec or less) High temperature water High temperature oil Argon, Helium Others (S, Q) (V, M) (V, M) (X, E, N, P) (D, N) R P N.O.
-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating
Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
~2~S M'6 Nylon tube, Mf6 Urethane tube Vacuum entry Applicatlle />10 -'-011'1> if!
Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.
range Actuation range A B Rotation range m 190 40 10 20 10 1 2 3 7 20.9 22.8 24.4 28.7 16.9 18.8 20.4 24.7 A A 190 35 10 20 10 190 30 10 15 10 When D-F9 is used 190 25 10 15 10 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.
12.5 14 8 33.6 20 8 16 5 66 46 24 64 24 27 13 86 9.5 7 85 M10 x 1.5 x 15 12.5 14 8 41.6 25 10 20 5 76 57 25 74 25 31 17 104 10.5 10 95 PA PB PW QW S T TT ta tb Q W Z M (N) MM NN P LD Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 8 7.5 M5 x 0.8 M8 x 1.0 M5 x 0.8 5.6 30 50 75 30 62 12.5 22.5 0.5 1 75 72 97 10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73
For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !
) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164
-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating
100 6-5-52 53 Series CG1Q Air Cylinder: Low Friction Type Double Acting, Single Rod With Mounting Bracket Without rod boot ZZ Axial Foot Style Axial foot style: CG1LQ Without rod boot Z Bore (mm) B LC LD LH LS LT LX LZ M W X Y 20 25 32 40 50 63 80 100 34 4 4 4 4 5 5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53
Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
mm Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing TPH TPS 37.4 18 4 4 4 10.4 KPH04-00 4 L L2 L1 D D 39.6 19.5 10 10 6 12.8 KPH06-00 6 M M L 44.4 21.5 26 18 10 15.2 KPH08-00 8 48.6 24 41 29 15 18.5 KPH10-00 10 50.6 25 58 46 18 20.9 KPH12-00 12 Note 1) D indicates the maximum diameter.
Cable length Suffix 05 10 15 20 Nil C Extension cable 5 m Extension cable & connector 10 m 15 m 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.
Load weight m (kg) Load weight m (kg) 40 50 32 40 10 10 32 2 5 100 10 200 2 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 6 Series MLGP Vertical Upward Mounting Ball Bushing Operating pressure: 0.4MPa MLGPL20, 25 9 30mm stroke or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 1 5 0.5 25 Load weight m (kg) Load weight m (kg) 25 20 20 1 0.1 10 50 100 200 0.7 10
Load weight m (kg) Load weight m (kg) 40 50 32 40 10 10 32 2 5 100 10 200 2 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 6 Series MLGP Vertical Upward Mounting Ball Bushing Operating pressure: 0.4MPa MLGPL20, 25 9 30mm stroke or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 1 5 0.5 25 Load weight m (kg) Load weight m (kg) 25 20 20 1 0.1 10 50 100 200 0.7 10
Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.