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Ratio of purge air flow rate to inlet air flow rate under standard performance conditions Outlet air flow rate: Value under standard performance conditions Table of Contents Single Style Standard Dew Point 20C (4F) specificationsPage 1 Standard Dew Point 15C (5F) specifications ..Page 5 Standard Dew Point 40C (40F) specifications ..Page 9 Standard Dew Point 60C (76F) specifications ..Page 11

The installation torque is 0.3 to 0.5 Nm. 14-11-15

17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load applied to rod

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.

No.EX-OMU0028-D PRODUCT NAME SMC Wireless System EtherNet/IP compatible MODEL / Series / Product Number EX600-WEN# (Base) EX600-WSV# (Remote) Contents Safety Instructions 2 SMC Wireless System Features 10 SMC Wireless System Outline 11 Outline 11 System configuration 12 Base 13 Remote 14 Definition and terminology 15 Assembly 17 Mounting and Installation 20 Installation 20 Model Indication

Attach the front panel. 11. Connect the power cable to the power breaker on customer side (primary side).

2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

MHK MHS 90 reverse unit MHC Air gripper for auto hand changing system MHT MHY Variations MHW Adapter for assembling robot Series MA2 8, 10, 11, 14, 15, 20 Series MA3 10, 11, 14, 15, 20, 24, 25 Additional installation unit of electrical contact point (Able to add 8 contact points) 90 reverse unit -X Air grippers for auto hand changing system (10 to 20) Standard type Narrow type Added to the

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

DIN Rail Manifold DIN Rail Manifold Common SUP/Common EXH Note) For more than 11 stations, supply air to both sides of 1(P) port and exhaust air from both sides of 3(R) port.

VQ110-L-M5 36.6 30.2 Manual override 4.9 4.9 12.4 15 E 22.7(Mounting hole) 2.5 12 17 About 300 (In case of latching) (Lead wire length) About 300 (Lead wire length) Lead wire color : Red Lead wire color : Black In case of latching type In case of locking knob type 42 40.7 35.6 11 SMC VQ110 -*L 30.7 JAPAN (4.1) (5.9) 5 (5.9) 5 5 A P 7 3 M5 (M3) 8.5 4.9 4.9 30.2 36.6 ( ) : In case of M3 Dimensions

LTF8PH100LTF8PH200LTF8PH300LTF8PH400LTF8PH500LTF8PH600LTF8PH700LTF8PH800LTF8PH900LTF8PH-1000100 200 300 400 500 600 700 800 900 2 3 4 5 6 7 8 9 10 11 1000 Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.5 sec.) Maximum acceleration: 3000 mm/s2 Positioning time (sec.)

A B C D E Applicable model Y200-D 3.2 35 13.2 42 0.6 AFF/AM/AMD/AMK20 Y300-D 4.2 43 16.2 53 AFF/AM/AMD/AMK30 Y400-D 5.2 51 19.2 71 AFF/AM/AMD/AMK40 Y600T-D 6.2 140 60 115 50 70 20 11 31.2 8 70 AFF/AM/AMD/AMK50 AFF/AM/AMD/AMK60 27 Y600-D 6.2 64 27.2 90 AFF/AM/AMD/AMK50 AFF/AM/AMD/AMK60 International Standard ISO 8573-1:2010 Compressed Air Purity Classes Compressed air is used in a variety

NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch