Rotary Table

Note 1) When using D-F8, mount it at a distance of 10mm or more from magnetic substances such as iron. -18- Specifications Table 1.

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Caps & Plugs . . . . . . . . . . . . . . . . . . . . . . . 18 Reducing Bushings . . . . . . . . . . . . . . . . . 18 Small metric fittings . . . . . . . . . . . . . 20 22 M3 x 0.5 Series . . . . . . . . . . . . . . . . . . 20 M5 x 0.8 Sereis . . . . . . . . . . . . . . . . . . 21 M6 x 1 Series . . . . . . . . . . . . . . . . . . . . 22 Stainless Steel Part Numbers . . . . . . . . . 24 Stainless

MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

Series SYJA300 3 Port Air Operated Valve

M3 X 0.5 Body ported 0.9 (0.05) 18 There are no copper parts that come in contact with the media; suitable for copper free applications SYJA322-M3 N.O. M3 X 0.5 SYJA314-M5 N.C. 39 (Without sub-plate 18) Base mounted (With sub-plate) M5 X 0.8 1.8 (0.1) SYJA324-M5 N.O.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

mm ZSE ISE ZSP 18 9.6 PS 20.8 ISA PSE In case of PSE54-M3 IS Application examples Application examples ISG Pads can be directly mounted.

Digital Pressure Switch ( compatible)

Power supply error from the IO-Link master : OFF Supply 18 to 30 VDC to the IO-Link master. COM: OFF Communication is not established. IO-Link wiring failure IO-Link indicator light Additionally tighten the IO-Link cable. (Replace the cable if it is broken.)

High-precision Digital Pressure Switch

Power supply error from the IO-Link master : OFF Supply 18 to 30 VDC to the IO-Link master. COM: OFF Communication is not established. IO-Link wiring failure IO-Link indicator light Additionally tighten the IO-Link cable. (Replace the cable if it is broken.)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Compatible Driver Pulse input type/ Positioning type Pulse input type CC-Link direct input type SSCNET#type Driver type Series LECSA LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 Pulse input v v Applicable network CC-Link SSCNET# Control encoder Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Communication function USB

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

CX QW NW PB DPF -X 20Cushion needle PG Q + Stroke Data (2-JJ counterbore, thread depth from bottom KK) Floating bracket mounting thread PC LW 2-T counterbore depth E PD 2-P HG NE H NH C NG G TT UU A N 2 x 2-P (Hexagon socket head taper plug) Z + Stroke (mm) Model MY3B16 MY3B25 MY3B40 MY3B63 A B C E G H HG JJ KK L LD LL LW M MM N 41 28.5 3.5 65 5.0 5.0 27 9.5 M4 x 0.7 2 6 18 61 6.0 M4 x 0.7

Air cylinder (Series compatible with secondary batteries)

Table 7 Auto Switch Mounting Height Auto switch model D-A9-900 D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center

CY1F

Auto Switch Internal Circuits D-A90V Auto Switch Weights Contact protection box CD-P11 CD-P12 OUT () Brown Reed switch (g) D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model OUT () Blue Lead wire length 0.5m 6 6 6 6 8 8 Lead wire length 3m 30 30 30 30 41 41 D-A93V Auto Switch Dimensions LED Brown OUT (+) Brown D-A90, D-A93, D-A96 Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode

Air Slide Table Series MXW

Width across flats 13 Operating port Rc 1/8 (NPT 1/8, G 1/8) 8 x M5 x 0.8 thread depth 13 Note) A Operating direction 6H9 + 0.030 0 depth 5.5 (Insert) 7 (Hexagon socket head taper thread plug) 48 98 72 41 10 8 25 40 40 40 Y Y Operating port Rc 1/8 (NPT 1/8, G 1/8) 41 160 B Operating direction 6H9 + 0.030 0 depth 5.5 (Hexagon socket head taper thread plug) 10.5 Operating direction B A 9.5

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Series VCL

36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25

Series VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option

Process Pump

7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 7.5 52 37 20

25

7.5 45 PAX PB PB 2 x 4.5 Mounting hole Manual override pin PAF 66 16 PA PB Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76

ITV

2 i Resin 15 Bowl assembly Silicone rubber u SRP 16 Sub-plate Resin 17 Seal NBR SRF 18 Control circuit assembly OUT SUP 19 Solenoid valve !3 VCHR 20 O-ring NBR w @1 @0 o 21 O-ring NBR ITV ITV 22 O-ring NBR e 23 Round head Phillips screw Steel IC Parts in contact with fluid are indicated with a mark .

ZQ-OM01301

59 Standard supply pressureNote 1) 0.5 61 57 53 50 43 41 79 76 4 0.1 17 15 12 23 0.2 28 25 21 39 0.3 42 33 37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa