Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 2 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 4 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 8 Stations, Symbol: 1, Port Size: 02 (1/4)

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 3 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Thermo-chiller

CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin, PP, PBT, POM, PU, PVC, PPS, AS, PS, EPDM, NBR, Ion replacement resin Electrical system Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Earth leakage breaker Rated current [A] 30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41

VND

External pilot air LVC Lubrication Temperature Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) 5 to 60C LVA No freezing LVH LVD Graph (1) VND 02 D Pilot Pressure (N.O. type) JIS Symbol Valve type Valve size N.C. N.O. Normally closed Normally open LVQ 0.7 12 (P1) 10 (P2) Pilot pressure should be within the range of A against the operating pressure.

VVX31/32/33

www.stevenengineering.com VX3 VXA VN Blanking plate LVC LVA Mounting hole Pitch n-Rc , 4 1 8 1 LVH LVD LVQ Stations Symbol 2 96 84 126 108 3 132 120 172 154 4 168 156 218 200 5 204 192 264 246 6 240 228 310 292 7 276 264 356 338 8 312 300 402 384 9 348 336 448 430 10 384 372 494 476 Model L1 L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41

Drain Separator for Vacuum Series AMJ 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

lPSMt

range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer, regulator combination Ref. catalog N5-G1 Modular type FRL Combinatton Recommended for control of pilot signal: NIT 200 OO 2G Electro-pneumatic regulator Ref. catalog N8-01 HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02

lPSMt

range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer, regulator combination Ref. catalog N5-G1 Modular type FRL Combinatton Recommended for control of pilot signal: NIT 200 OO 2G Electro-pneumatic regulator Ref. catalog N8-01 HOW TO ORDER x . x x Supply & Output Pressure Gauge f 00 no gauge 01 2k$/cnf 02

-- NCM seies

Silrc" lrcyrinder -NCM seies Stainless Steel Cylinders Stainless Steel Body for Low Breakway Friction Double Rod/Double End Mounting 6 Available Mounting Options Non-Rotating Option Auto Switch Capable Air Cylinder: Standard Type Series:NCM Series NCM How Toordcr NC DMrB075-02 00 C S J 851 xB6 T r I Lo**" Auto-Switch Capable I xB6 -High Temp. I XB7 -Low Temp.

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, Vacuum Pad, with Buffer, VACUUM PAD, ZP, ZP2, ZP3, M30, 41 lb

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 20 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Series: 3 (VP300), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 18 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)

Piping: 1 (Bottom Direction), Body Color: W (Urban White), Piping Type: Rc, Connection Size: 02 [Screw-in (Port Size 1/4)], Nozzle: 41 (Copper Extension Nozzle 100mm Length, VMG1-08-250-100)

ITVH

M5 x 0.8 hole Built-in regulator EXH Built-in regulator EXH IRV Solenoid valve EXH 1/4 (Rc, NPT) Port 3 (Exhaust port) VEX 38.5 24 72 41 24 Port 3 (Exhaust port) 58 39 SRH Port 2 (Output port) Port 1 (Supply port) SRP 1/4, 3/8 (Rc, NPT) Port 1 (Supply port) SRF 1/4, 3/8 (Rc, NPT) Port 2 (Output port) ITV 36 IC 36 4 x M5 x 0.8 depth 11 Bracket mounting hole ITVH ITVH Do not block three EXH

XLAQ/XLDQ

normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW) Body: Aluminum alloy, Bellows: Stainless steel 316L, Bellows holder: Stainless steel 304, FKM (Standard seal material) Note 2) Principal materials External: Hard anodized Internal: Raw material Surface treatment 0.4 to 0.7 Pilot pressure (MPa) (G) Pilot port size M5

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Vibration, Noise L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEJ40 M5 3.0 5.5 36.5 LEJ63 M6 5.2 6.8 49.5 Items for internal check 1. Lubricant condition on moving parts. For lubrication, use lithium grease No. 2. 2. Loose or mechanical play in fixed parts or fixing screws.