The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MFL ASSY. VALVE. SS5YJ3 OTHER SIZE RATING. .30800 lb. 1K.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MANIFOLD ASSY. VALVE. SS5YJ3 BUILT IN FITTING

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MANIFOLD ASSY. VALVE. SS5YJ3 OTHER SIZE RATING. .30800 lb. 1K.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MANIFOLD ASSY. VALVE. SS5YJ3 OTHER SIZE RATING. .38060 lb. 1K.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MANIFOLD ASSY. VALVE. SS5YJ3 OTHER SIZE RATING. .55000 lb. 1K.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available SS5YJ3 MFLD SYJ3000. MANIFOLD ASSY. VALVE. SS5YJ3 OTHER SIZE RATING. .70400 lb. 1J.

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

IR1000/2000/3000

AL 14-5-21

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

PSE200

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

KB

24 27 18.0 27.0 2.1-77 Piping Module Series KB 2 Air Supply Port Male connector socket: KBB H (Hex.) 8 10 14 19 T Connecting thread M5 X 0.8 M6 X 1 Rc(PT) Rc(PT) Weight (g) Part No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

MXF

For details, refer to page 8-30-31. 8-6-14

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42R Manifold: Side Ported/SS3YJ7-42RStations -01, , Grommet (G) 63.5 M5 x 0.8 (X port

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

Process Pump

AIR SUP (P1) Rc, NPT, G 1/8" (12.7) 119 106 13 79 39 14 FLUID IN 1/2" tube extension AIR SUP (P2) Rc, NPT, G 1/8" 59 110 Foot (Option) 611 PAF Series Dimensions: Air Operated Type (PAF3000 Series) With nut (with LQ1 fittings): PAF3413S-1S13 1S19 152 2 x M5 x 0.8 Thread depth 9 139 114 116 95 19 4 x 7 Bottom view of body FLUID OUT AIR SUP (P1) Rc, NPT, G 1/8" With nut 119 106 13 79 39 14

80

dimensions (XD) Electrical entry Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17 15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 M 2 x J thread depth K 465 VDW Series Glossary of Terms Pressure Terminology Others 1.