VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

VXD21/22/23

Oil Air Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Model Air Water Thread Oil AC DC AC DC AC DC 0.7 0.7 1.0 0.7 1.0 1.0 Max. system pressure (MPa) 1 4 1.9 2.4 4.5 2.4 5.5 9.5 VXD2130-02 VXD2130-03 VXD2140-03 VXD2130-04 VXD2140-04 VXD2150-06 10 10 15 10 15 20 0.02 0.02 0.02 0.02 0.02 0.02 2.0 2.4 5.0 2.4 5.5 9.5 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

Speed Controller with One-touch Fittings

17 18 21 22 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 22.8 12 20.5 4.3 8 19.3 22 25 12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

energy saving effect

Required ventilation rate [m3/min] Heat radiation amount [kW] Differential temp. of 3C Differential temp. of 6C Model between inside and between inside and outside of installation area outside of installation area HRSH100-Al-l Approx. 18 305 155 HRSH150-Al-l Approx. 29 490 245 HRSH200-Al-l Approx. 35 590 295 HRSH250-Al-l Approx. 44 730 365

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Max. load mass 2 = M/Mmax MY Review M1, M2, M3 Mmax is the allowable moment 2. Static moment CY 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

76

The intersection H is the amount of moisture included in the compressed air 1 m3 at 102 psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 3.0 g/m3. 10.

Air preparation filter

at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.

VQ5000

None 9 22 SOL.B 18 () (+) Gray None 5 stations 10 .

SMC Electronic Switch Series Variations

Material Cover Front rim Retaining rim Description Part no. includes M3 X 8 tapping screws (2 pcs.)

COQ2BP

(mm) ,. 50 43.5 M8x1.25 MBK1.2S 99 6.6 67 9 76 89 18 Ml0X1.5 15 , (mm) 63 104.5 43.5 Ml0xl .5 18 M1Ox1.5 9 9 18 80 92 108 Ml0X 1.5 15 I 122 80 53.5 M12x1.75 22 M12x1.75 11 11 99 116 20 M16X2.0 134 21 Series CDQ2BP High Magnetic Field Resistance Head Side Flange: C002GP 0 -0 OM-C:J (mm) FT FII FX FZ Ll H C ; Bote . ... (mm) H Th read C Depth R N FD ,.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5 M3 x 0.5 6 M3 x 0.5 5.5 2.6 2H9 3 1.5 M3 x 0.5 6 112211221122MHZ2-16D 17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5

Nozzle Type Ionizer

61 61 Pivoting bracket IZN10-B2 20 3.4 64 56 90 (Mounting angle adjustable range) 11.4 28 20 20 9 24 3.4 4 14 40 18 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x

CJ2X/CUX/CQSX/CQ2X/CM2X

Additional specifications No shock absorber is available for the Series MGGM. 10-3-18 18 Related Products: Speed Controller for Low Speed Operation The effective area of controlled flow is approximately 1/10 of the standard type. These controllers are suitable for controlling the speed of microspeed cylinders.

CJ2X/CUX/CQSX/CQ2X/CM2X

Additional specifications No shock absorber is available for the Series MGGM. 10-3-18 18 Related Products: Speed Controller for Low Speed Operation The effective area of controlled flow is approximately 1/10 of the standard type. These controllers are suitable for controlling the speed of microspeed cylinders.

PSE530/200

CH4 CH3 Pressure value for each channel are displayed at 2 second intervals. 16-3-18 18 Series PSE Specific Product Precautions 1 Be sure to read before handling. Controller Pressure Sensor Handling Handling Warning Warning 1. Do not drop, bump, or apply excessive impacts (1000 m/s2) while handling.

Swivels

D Swivels Male Pipe Female Pipe Part Number A B Hex 1 Hex 2 Port 1 Port 2 A PS410102-4-4 2.87 1.85 .75 1.19 1/4-18 1/4-18 72.9 mm 47.0 mm 19.0 mm 30.2 mm NPTF NPTF B Hex 1 Hex 2 PS610102-6-6 2.98 1.92 .88 1.31 3/8-18 3/8-18 75.6 mm 48.8 mm 22.2 mm 33.3 mm NPTF NPTF Port 1 PS810102-8-8 3.24 1.96 1.12 1.50 1/2-14 1/2-14 82.2 mm 50.0 mm 28.6 mm 36.5 mm NPTF NPTF Port 2 PS1210102-12-12 3.46 2.16

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.