Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 13 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 16 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 3 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 4 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -
SI unit for CC-Link 5 E9H RX9F to RX90 169H RY9F to RY90 RX10 RY10 Output No.16 EAH RXAF to RXA0 16AH RYAF to RYA0 RY11 Output No.17 6 EBH RXBF to RXB0 16BH RYBF to RYB0 RY12 Output No.18 Unused RY1D Output No.29 RY1E Output No.30 RX1F RY1F Output No.31 Unused area cannot be used.
Material Case Note 1 Electrolytic polishing (Interior/Exterior) SFB10-02 Stainless steel 316 Cover 2 0.1 Clean gas filter For SFB10 PTFE membrane Element 3 Clean gas strainer For SFB20 Stainless steel 316 sintered metal O-ring 4 FKM Hexagon socket head cap screw 5 M3 Max. flow rate line Stainless steel 304 Pressure drop MPa Inlet pressure Bracket 6 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5
.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--
SYJA3 20 1 M3 Body ported Base mounted (4 port) (Manifold use only) SYJA3 30 2 Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port With sub-plate M5 3 position closed center Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B)2 4(A) (B)2 4(A) 1
Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Note 3) Bowl O-ring and other O-rings are slightly lubricated. Note 4) When the outlet pressure is 0.5MPa. (The rated flow varies depending on the set pressure.) Keep the air flow within the rated flow to prevent an outflow of lubricant to the outlet side.
Meter-out Meter-in 0 1 Note) M3 and M5 sizes: s (with seal) is not necessary. Thread type Cylinder side R Tube side Rc Symbol Bore size Metric thread (M3, M5) Nil Symbol Bore size Applicable series Made to Order (Refer to page 523 for details.) Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread.
indicator LED M3 Ground terminal Position indicator LED LINK OUT GATEWAY UNIT EX500 SERIES IN EX500 SERIES GATEWAY UNIT (M12, 5 pins, socket) LAN PE PE PWR PWR LINK LINK SOL 100 L RUN OUT Power source connector Note 1) MS L ERR.
Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Accessory part no. Accessory Applicable model AFD20 AFD30 AFD40 AFD40-06 AFD40 Note 1) Bracket assembly AF20P-050AS AD27 AF30P-050AS AD38 AD38NNote 3) AF40P-050AS AD48 AD48NNote 3) AF40P-070AS AD48 AD48NNote 3) N.O. N.C.