HRX-OM-W002

HRR Series 5.5 Advanced setting mode 5-43 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Table 5.5-1 List of alarms which allow to continue pump operation Display Alarms which allow to Alarm no.

MX-OMP0051

M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52 2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22 Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43

LEF-OM002xx

Electric actuators / Slider type Common precautions . 39 6.1 Design and selection . 39 6.2 Handling . 39 6.3 Mounting . 40 6.4 Precaution on maintenance . 40 6.5 How to detach and attach the dust seal band . 42 6.6 Replacement of belt . 43 7.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Electric actuators / Slider type Common precautions . 38 7.1 Design and selection . 38 7.2 Handling . 38 7.3 Mounting . 38 7.4 Auto Switch Mounting . 40 7.5 Precaution on maintenance . 41 7.6 How to detach and attach the dust seal band . 42 7.7 Replacement of belt . 43 8.Troubleshooting . 43 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5 16.5 20 24.5 22 34 43.5 58 73 28 37 54 71 80 14.5 19 28.5 35.5 44.5 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43

Transfer

43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

C95

45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

21 up to 750 30 21 92 14 16 41 72.8 M26 X 1.5 215 116 52 87.5 M12 X 1.75 126 20 21 17 40 40 11 23 0 37 40 26 With rod boot Non-locking CBAI40SCBA11, #1 CBAI50SCBA12, #1 CBAI63SCBA13, #1 CBAI80SCBA14, #1 CBAI100SCBA15, #1 Locking CBAIB40SCBA11, #2 CBAIB50SCBA12, #2 CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43

CM2

Refer to p.0-39 to 0-43 for Safety Instructions and common precautions. This cylinder eliminates any influences of copper ions or fluororesins on color CRTs. Copper materials have been nickel plated or replaced with non-copper materials to prevent the generation of copper ions. Handling Warning qDo not rotate the cover.

CNG

cover Aluminum alloy Rod seal B NBR White hard anodized 38 3 Cover Aluminum alloy Piston seal NBR White hard anodized 39 4 Intermediate cover Aluminum alloy Cylinder tube gasket NBR White hard anodized 40 Carbon steel 5 Piston rod Release piston seal NBR Hard chrome plated 41 6 Piston Aluminum alloy Rod seal C NBR Chromated 42 7 Taper ring Carbon steel Piston guide gasket NBR Heat treated 43

CXS

0.5 x 12.5 (Hexagon head bolt) M3 x 0.5 (Hexagon nut) 6 7 2-M5 x 0.8 with depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through) 2-M3 x 0.5 (Through) S (13 + ST) 10 2-M3 x 0.5 with depth 4.5 (Opposite side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

A

48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

Low torque Metal seal type Rotary joint

1 2 3 4 2 1 8-5 x 0.8 10 counter bore depth 1.5 14 *5 27 6.5 3.5 6.5 3.5 15H8 (8) 20H8 (6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43

MGC

40.5 44 38.5 40.5 42 40 37 43 ( ): For long stroke 3.20-14

MHF2

0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43