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IN OUT 2.2.4 10mm ( IDFA100F150F 2 4 2.2 IDX-OM-U022 2. 2.2.5 IDFA100F150F 2 5 2.2 IDX-OM-U022 2. 2.2.6 6-1 IEC [] ) [30mA 15A] [] [IDFA100F, 125F] 3.5mm 2 (12AWG) 1418mm4 () [IDFA150F] 3.5mm 2 (12AWG) 1823mm4 () 0.6m [] 30m (1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 IDFA100F150F 2 6 2.2 IDX-OM-U022 2. 0.5mm 2 (20AWG)17mm 6 0.9m 30m (1.3 ) M3 : 6.5mm

Series ZMA Specifications Vacuum ejector specifications Valve specifications Pilot type Type of actuation Air Fluid Main valve Poppet Maximum operating pressure 0.7MPa Effective area 3mm Maximum vacuum pressure 84kPa Operating pressure 0.25 to 0.6MPa Supply pressure range 0.25 to 0.55MPa 5 to 50C Cv factor 0.17 Operating temperature range Polyethylene sintered body (30m) Electrical entry

(1.3 ) M4 : 9.5mm R 1 M5 : 9.5mm M4 1.42.0Nm R M5 2.6Nm 2-9 IDF100150F-W 2.2 2 7 IDX-OM-Z004 2 2 (20AWG)17mm 6 0.5mm 0.9m 30m (1.3 ) M3 : 6.5mm M3 0.631Nm OFF 56 alternate ON ONOFF OFF IDF100150F-W 2.2 2 8 IDX-OM-Z004 2 2.3 2.2.1 1. 2. 2 3. 4. 5.

6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand pressure 0 to 60C (0 to 140F) (with no freezing) Operating and ambient temperature range 30m

: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m

machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m

M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDU Series 2 4 IDX-OM-W014 2 2 3 ()2 2 2-2-3 4 IDU Series 2-3 2 5 IDX-DM-W014 3 3 1 IDU3E6E ` 3 2 ON IDU3E6E 5 0.15MPa IDU Series 3-1 3 1 IDX-DM-W014 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 IDU Series 3-3 3 2 IDX-OM-W014 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 1 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 2 , 2 2 2 2 3 , , ,, 4 , , , , , , , , , , , , 5m [] ,, , , , , , , , 5 ,, , , , , , , , , , , , , , 6 , 2 ,40mm, ON ON ON ON , ,: 1000 (ms) (mm) V(mm/s) = <> ,,(ON ) ,5m , ,30m, , <> ,100m <> (D-A96A96V ) ,,( ) [n ,n ] ,, ,, ,D-A90,A90V

M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () IDU Series 2 4 IDX-OM-W023 2 2 3 ()2 2 2-2-3 4 IDU Series 2 5 IDX-DM-W023 3 3 1 IDU8E15E1 ` 3 2 ON IDU8E15E1 5 0.15MPa IDU Series 3 1 IDX-DM-W023 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 IDU Series 3 2 IDX-OM-W023 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDF Series 2 4 IDX-OM-W011 2 2 3 ()2 2 2-2-3 4 2-3 IDF Series 2 5 IDX-DM-W011 3 3 1 IDF4E15E1 ` 3 2 ON IDF1E3E IDF4E15E1 5 0.15MPa (IDF1E ) 3-1 IDF Series 3 1 IDX-DM-W011 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 3-3 IDF Series 3 2 IDX-OM-W011 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2

M3 6.5mm 1.25mm 2 1 2 2. 2.1 ( ) 2 2 1 2. 2.2 2.2.1 (1) (85%) 240050 () 2000m (2) 2 2 2. 2.2.2 P.6-2 6.2 1 1 5 4 3 2 1 600mm 600mm 600mm 600mm 600mm 2 3 2. 2.2.3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 2.2.4 10mm ( ) 2 4 2. 2.2.5 6-1 IEC () IDF15E1-10(100V ) AC100V () [30mA 10A] IDF15E1-20(200V ) AC200V () [30mA 10A] 1.25mm 2 (16AWG) 812mm3 () 0.1m 30m

L N PE M3 6.5mm 1.25mm 2 :17 1 2 2 2 , 2 1 IDFA6E 20kg 2 2 2 2 2 1 240 050 ( ) 2000m 600mm 600mm 600mm 600mm 600mm 2 1 2 2 2 2 6 6-2 2 2 3 50 50 2 2 4 10mm ( 2 2 2 2 2 5 6-1 IEC AC200V 30mA 5A 1.25 216AWG,3 ,812 0.1m 30m M3 1.25-3 6.5mm () M3 0.61Nm 2 3 2 2 3 () 2 2 () 2 4 3 / 3 3 1 INOUT 3 2 ON () INOUT 5 ONOFF 0.15MPa NO IN 3 1 3 / 3 3 OFF OFF

Single Double 3-position 0.15MPa 0.1MPa 0.2MPa 5 to 60C Note 1) 1 (P) 5 (R1) 3 (R2) Minimum operating pressure 2-position double (metal) (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation Not required (non-lube type) Push type (tool required) 150, 30m

60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m

-2No.PS-OMS0006CN-G / *3) 1 1.5 3) 1 1 -3No.PS-OMS0006CN-G () () () () -4No.PS-OMS0006CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMS0006CN-G * FG (35 N () ,() *() 6 33 () () 30m DC(-)() * -6No.PS-OMS0006CN-G ( ) () CE/UKCA -5~50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F

IDFA75E) IDFA Series 1-1 1 1 IDX-OM-W032 1 (IDFA75E) () IDFA Series 1-1 1 2 IDX-OM-W032 2 2 2-1 50kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDFA Series 2-1 2 1 IDX-OM-W032 2 2 2 2 6 6-3 2 2 3 50 50 OUT IN (IN) (OUT) 2 2 4 10mm IDFA Series 2-2 2 2 IDX-OM-W032 2 2 2 5 6-1 IEC AC230V [30mA 10AIDFA75E 20A] 216AWG 812mm 3 () 1.25mm 0.2m 30m

Single Double 3-position 0.15MPa 0.1MPa 0.2MPa 5 to 60C Note 1) 1 (P) 5 (R1) 3 (R2) Minimum operating pressure 2-position double (metal) (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation Not required (non-lube type) Push type (tool required) 150, 30m

Single Double 3-position 0.15MPa 0.1MPa 0.2MPa 5 to 60C Note 1) 1 (P) 5 (R1) 3 (R2) Minimum operating pressure 2-position double (metal) (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation Not required (non-lube type) Push type (tool required) 150, 30m

-2No.PS-OMR0001CN-J 1 / 1 1.5 *3) *3)1 1 -3No.PS-OMR0001CN-J 1 SMC 100 1 -4No.PS-OMR0001CN-J 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4

pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type Not required Lubrication Unrestricted Mounting position 150/30m