Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: NRYZ (N + R + Y + Z)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: BG (B+G), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 01 (1/8), Options: B (w/Bracket), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving), Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes), Flow Direction: R (Right to Left)
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: R (Right to Left)
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: BG (B + G), Semi-Standard: 1NRYZ (1 + N + R + Y + Z)
Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 01 (1/8), Options: w/o Mounting Option, Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving), Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: B (w/Bracket), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: N (Non-relieving Type), Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)
Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: B (Assembly of a Bracket & Set Nuts), Semi-Standard: NRYZ (N + R + Y + Z)
Ionizer Nozzle type IZN10 Series IZS Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 5 5 0.1 MPa 0.05 MPa 4 4 0.3 MPa 0.05 MPa Discharge time [s] Discharge time [s] 3 3 0.1 MPa 2 2 0.7 MPa 0.3 MPa 1 1 0.5 MPa 0.5 MPa 0.7 MPa 0 0 200 400 0 0 400 200 Distance [mm] Distance [mm] (3) Female threads for piping/IZN10
Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation
Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min.
1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2
-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD
Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !
ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !