3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 51.5 64.5 87.5 98 L1 L2 L3 L4 4-14-36 37 Base Mounted 3 Port Solenoid Valve (Manifold: Connector Kit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 VV3QZ25Stations Port

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

CQ2 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Built-in Magnet Cylinder Model Double acting Action D 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 RQ If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQSL25-30D 25 For Manufacture of Intermediate Strokes, refer to page 552.

Rotary Clamp Cylinders

= 1 + 2 = (1.6 + 3.0) x 104 = 4.6 x 104 kgm2 Stroke time Note 2) Series MK MK2 Average piston speed Note 1) Stroke total Max. piston speed 120 mm/s 200 mm/s 75 mm/s 125 mm/s 0.35 sec. 0.2 sec. 25 mm Note 1) Average piston speed = Maximum piston speed 1.6. Note 2) Please use the stroke speeds indicated above.

Cylinder with Lock/Double Acting, Single Rod Series CNS

Therefore repair at SMC is recommended. 56 %7 Guide gasket NBR Tube gasket NBR Replacement Parts: Lock Unit CNS D 125 TN UA Unit assembly Bore size (mm) Thread type Locking direction (Both directions) Nil TN NPT TF G Rc 160

Compact Cylinder/Guide Rod Type Series CQM

Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch RQ 0.3 0.5 0.7 25 Bore size (mm) Cylinder stroke (mm) 59 42 IN 12 100 35 30 15 20 25 5 10 40 45 50 75 CQM 79 57 OUT 34 12 16 20 25 32 40 50 63 80 100 69 77 86 60 44 52 106 75 IN 45 16 97 108 87 56 67 77 MU 141 101 OUT 60 167 152 92 107 122 137 183 198 213 227 165 118 IN 71 20 216 162 180 198 125

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch

-- NCM seies

D-864 Bone Sizes Rod Boot o75 -%', 088 -',6' 106 -1%6" 125 -114" 't50 -1%' J -Nylon K -Neoprene Astuation -Double Acting S -Spring Return T -Spring Extend srror,.rrn"r, Sirokg/Hundrlh ol an lnch Cushion' C -Rubber Bumper Note: Min. Strokes for Auto Switch Cylinders page 5. *Rubber Bumpers are no additional cost on 7s" & 174" bore size cylinderg. Thy are options on the other bore sizes.

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. | v d With Air o2Olo Utilizes Innova ve 125 Lalge bore size Single -*9$.s"*-,,q e. 180 200 q 125 A DoLble o r o d c02w irlf, rt .16 -+il&4-160 180 2AA Lono stroke g I Sinqle P.4o -, rOO -d.G.*{b-40-**+-'o.or 1 : rN)c0r 80 1oo tlnJ' -*--*-*--33 13 = cQ2L:s 5 s'F ."-"c" :^''^" *'."' -.t;^'."d;-:.df o,r's!.4 d.!

pa

(cycles/min) = = Cycles per minute Discharge per cycle Reference life cycles 1 1 = x x Service life Cycles per minute 8 (Daily operating time) 60 100,000,000 1 1 = x x 125 60 8 1666 days = 17-5-145 Series PA/PAX/PB Precautions 5 Be sure to read before handling.

125

3 Port 3 Position Valve VEX3 Series Pilot Solenoid Air Operated RoHS Intermediate stopping of cylinders up to 125 * is possible.

CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin

90

exhaust (EXH) port 3 10.5 n x Vacuum (V) port (Built-in suction filter) (n1) x 15 15 33 (mm) Number of stations Hexagon width across flats B A D C Port type 1 2 3 4 5 6 7 8 9 10 06 08 07 09 9.7 12.3 8.3 11.4 10.8 11.4 8.7 11.3 4 6 4.76 6 Metric size L1 L2 L3 L4 L5 L6 30 45 56.8 67.5 62.5 73 45 60 71.8 82.5 75 85.5 60 75 86.8 97.5 87.5 98 75 90 101.8 112.5 112.5 123 90 105 116.8 127.5 125

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes Bore size [mm] Standard stroke [mm] Note 1) Long stroke [mm] Note 2) 40 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500 800 Refer to pages 18 to 23 for cylinders with auto switches. 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600 1200 Minimum stroke for auto switch mounting Auto switch proper mounting position (detection at

MLGP

, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

Diaphragm Valve for Ultra High Purity

0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Weight 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa). 2) Weight for AZ3542S2PMV4MV4 including individual boxed weight.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

-XA< Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel -XC7 (mm) Standard stroke Bore size Long stroke (L and F only) -XC8 -XC14 -XC15 -XC30 Adjustable stroke cylinder/Adjustable extension type 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Change of trunnion bracket mounting position Change of tie-rod length Rod trunnion 40 800 25, 50, 75, 100, 125, 150

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.