Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Air Cylinder Series CM2

2) 2 15 + 45 10 15 60 60 + 45(n 2) (n=2, 4, 6) CJ2 D-C73C D-C80C D-H7C (n 2) 2 15 + 50 CM2 10 15 65 65 + 50(n 2) (n=2, 4, 6) CG1 (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55(n 2) 10 15 75 (n=2, 4, 6) MB (n 2) 2 20 + 50 D-B59W 75 + 55(n 2) 15 20 75 MB1 (n=2, 4, 6) D-A3A(2) D-G39A D-K39A D-A44A CA2 35 + 30(n 2) 100 + 100(n 2) 10 35 100 CS1 Note 1) Auto switch mounting (The adjustment as

7

2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Stability of suction position,

2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

High Power Cylinder:

) Yes Q Relay PLC IC 24V H7NW Q q Q 5V 12V Diagnostic indication (2 color) 3 wire (PNP) H7PW Q q Q H7BW Q q Q 2 wire 12V Water resistant (2 color) Grommet H7BA q Q 3 wire (NPN) G5NT With timer q Q IC 5V 12V H7NF Q q With diagnostic output Q 4 wire (NPN) Latch with diagnostic output(2 color) H7LF Q q Q Lead wire length 0.5m (Example) C80C 5m Z (Example) C80CZ 3m L C80CL N

Thermo-chiller

Note q Overflow port assembly 1 w Automatic fluid fill assembly 1 e Automatic fluid fill tank assembly PE 1 r M4 screw 2 For securing automatic fluid fill assembly t M6 screw 2 For securing overflow port assembly y Hose clamp 1 For securing automatic fluid fill assembly hose u Hose clamp 1 For securing overflow port assembly hose i Automatic fluid fill label 1 w q r t x 2 x 2 y u i uBall

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Rotary Actuator

2 i u w !4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Air Slide Table

MXQ 6A-2 With end lock (6) Q Dimensions [mm] 5 J Model J Q MXQ6A-10Z2 57.5 25 MXQ6A-20Z2 MXQ6A-30Z2 78.5 5.5 Pilot port 2 x M5 x 0.8 7.5 33 MXQ6A-40Z2 90.5 MXQ6A-50Z2 100.5 0.5 3 3 34 8.5 5 3 23 MXQ6A-10Z2 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) 5 J * Dimensions other than those listed above are the same as those for the standard type. 5.5 MXQ 6A-2 With end lock, extension stroke

Vacuum Unit

M Replacement of filter element M Replacement of filter case M Replacement of sound absorbing material 2 steps 2 steps 3 steps e q q q w w w Filter case Filter element Silencer cover Sound absorbing material Transparent filter case allows visual check of the contamination. If there is dirt inside the case, it is possible to remove the case and clean it.

Modular Type Air Filters Series AF

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

NCQ8

bolt circle 1.06 Auto switch 0.22 0.13 1.06 + Stroke 075 (3/4"), 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

LVQ

T) V 1 2 1 2 1 2 1 2 LVQ3 , LVQ4 LVQ5 , LVQ6 N M V A B U B A Z (Max.

2/3 Port Valve

2 i P2: Pilot EXH port P1: Pilot SUP port !0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300