VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 8 18 41 55.4 23.8 31.6 56.9 24.3

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Refrigerated Thermo-chiller

In order to prevent a sudden product failure of the unit, replace the replacement parts every 36 months. 2. Perform an inspection of the circulating fluid every 3 months. 1. In the case of fluorinated fluids: Discharge the circulating liquid and avoid any dirty objects, or water moisture, or foreign objects entering the system. 2.

Precision Regulator Series IR1000/2000/3000

KT-IR1000 KT-IR2000 KT-IR3000 KT-IR2120 KT-IR3120 Note) Use mini-flick type. 555 Series IR1000/2000/3000 Dimensions IR100-01 IR200-02 10.5 42 Mounting hole 28 2 50 Mounting hole 12.5 36 Panel mounting hole Bracket (Option) 30 2 25 Bracket (Option) Max.4 Panel mounting hole Pressure gauge (Option) Max.4 Pressure gauge (Option) Panel When mounting on a panel, refer to page 561 in Specific

KB

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KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

AD402/600

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Digital Flow Switch (Integrated display type)

Device state parameters (index 36) Readable device states are as follows.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

If a bend (R) is used, limit it to R3 or less. 12 Series PFMB7 Dimensions PFMB7201 With bracket/Without flow adjustment valve With bracket/With flow adjustment valve 48 76 36 24 28 28 4 x 3.4 34 26 18 34 26 18 4 x 3.4 36 51.5 (Max. 58.5) 43 43 48 48 18 18 1.2 1.2 DIN rail mounting 18 x n pcs. + 34.4 18 48 43 52.4 1 1 IN 1 IN IN DIN rail is prepared by customer.

3 Port Solenoid Valve

71.4 46.2 81.6 56.4 91.8 66.6 102 76.8 112.2 87 122.4 97.2 132.6 107.4 142.8 117.6 153 127.8 163.2 138 173.4 148.2 L1 L2 Lateral connector Panel fitting dimensions/Mounting hole dimensions M3 x 0.5 recommended 30 33 L2 L1 Station n 1 2 3 4 5 6 7 8 9 10 11 12 52.4 36 62.6 46.2 72.8 56.4 83 66.6 93.2 76.8 103.4 87 113.6 97.2 123.8 107.4 134 117.6 144.2 127.8 154.4 138 164.6 148.2 L1 L2 18

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

Micro Mist Separator Series AFD20/30/40

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Mist Separator Series AFM20/30/40

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2/3 Port Valve for Various

36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392

Digital Flow Switch (Integrated display type)

and How to Order 10 Summary of Product parts 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Flow Setting 20 Function Setting 22 Default settings 22 F0 Unit selection function 23 F1 Setting of OUT1 24 F2 Setting of OUT2 27 F3 Operating fluid 28 F4 Reference condition 29 F5 Response time 30 F6 Display mode 31 F7 External input 32 F8 Display resolution 35 F9 Auto-preset 36

Membrane Air Dryer

.: 10 (NPT threads: 3/8 inch) Total length of the separator With float type auto-drain With drain guide Model A F G H B C D E Port size IDG60LAM2 IDG75LMA2 IDG100LAM2, 100SAM2 348 418 483 326 396 461 363 433 498 3/8 170 212 14 223 209 36 Series IDG

3

hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor for Water PF3W3 Function Details 14 Series PF3W Dimensions PF3W711-U25 Integrated display 77 1.4 7 154 57.6 77 23 70 46 30 58 2 x 25A 4 x 5.5 59 36

Low Profile Slide Table Series MXF

H 25 3H9 depth 3 +0.025 0 4 3H9 depth 3 +0.025 0 (mm) N H I J M Z ZZ Model MXF12-20 4 22 11 36 65 65 76 MXF12-30 4 30 12 45 75 75 86 MXF12-50 6 65 13 80 111 111 122 142 Low Profile Slide Table Series MXF Dimensions: MXF16 Stroke adjuster at retraction end Stroke adjuster at extension end Width across hexagon socket hole 3 Width across flats 8 MXH N 2 ( 1) x 35 24 MXU Note) Blanking plug

Multistage Ejector Series ZL112.212

With vacuum adapter ZL112-GN ZP V SP 61 ZCUK Exhaust port Digital pressure switch for vacuum 2 x 5.4 Mounting hole AMJ With digital pressure switch for vacuum ZL112-D P AMV S V AEP (1900) HEP Section A Air pressure supply port (P) Applicable tubing O.D. 6 Vacuum port (V) Applicable tubing O.D. 12 2 x 5.4 Mounting hole Related Equipment Label EJECTOR MULTISTAGE 59.5 59 56 8.5 30 4.5 166 175 36

AC Servo Motor Driver (CC-Link Type)

Acceleration/de celeration time 0 to 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min). -36- 5.5 Changing I/O Signal Allocation Input/output signal assignment can be changed as appropriate from initial settings. There may be cases when changes to the Input/output signal assignment are required for actuator operation.