Compact Vacuum Ejector Series ZA

pressure 80 80 40 Suction flow (l/min(ANR)) Air consumption (l/min(ANR)) 1 2 3 4 5 6 7 8 Left Right Vacuum pressure (kPa) Vacuum pressure (kPa) 70 ZA1071-K15L-FP1-M2 ZA1051-Q15L-FB-M1 ZA-BP1 60 60 30 Vacuum (V) port 50 40 40 20 Air consumption 30 20 20 Suction flow 10 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) 851 Series ZA Specifications General

Series VS

.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 56n + 90 L2= 71n + 90 L1= 71n + 66 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 1 SIZE 2 SIZE 3 n 3 2 n n 2 3 4 5 6 7 8 9 10 7 5 4 6 9 8 10 5 4 3 2 9 8 7 6 10 L L L L1 258 202 314 482 426 538 594 650 L1 208 279 350 421 492 563 634 705 776 370 L1 158 201 244 459 287 330 373 416 502 L2

OMR0032

External Connection (P.20) for wiring. Refer to section 17.

ZSE F/ISE

A PF2 30 20 IF Data 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Front protection cover The thickness of the panel is to 3.2 mm. 16-2-35 12 High Precision, Digital Pressure Switch for General Fluids Series ZSE60F/ISE60 How to Order M ISE60 A2 22 L

Digital Gap Checker

L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.

Rotary Table

*Auto switches are shipped together, (but not assembled). -18- With external MSQ 10 2 M9BW L shock absorber Size Made to order 10 C With interchangeable plate 20 Thread type 30 50 End port tye Size Nil M5 10, 20 Shock absorber type Nil Rc1/8 L 30, 50 Shock absorber for low energy -XF G1/8 H Shock absorber for high energy NPT1/8 -XN -XT NPTF1/8 Port location/Rotation *Side ports are all

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Modular Type Regulator Series AR

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Refrigerated Air dryer Series IDU/IDF

Note 2) The data for l/min (ANR) refers to the conditions of 20C, 1atm. pressure and relative humidity of 65%. Note 3) Install a circuit breaker with sensitivity of 30mA. Note 4) IDU3D to 8D-4/6 are only for frequency of 50Hz. Note 5) Spare part for auto drain INA-20-41-04 is AD44-x445.

Voltage Monitor for PFMV5

min 0 to 3 L/min 0.5 to 0.5 -0.05 to -1 to -1 L/min -3 to 3 L/min L/min L/min Display flow range Set flow range -0.025 to -0.05 to -0.15 to -0.525 to -1.05 to -3.15 to Flow 1 0.525 L/min 1.05 L/min 3.15 L/min 0.525 L/min 1.05 L/min -3.15 L/min Minimum setting unit 0.001 L/mim 0.01 L/mim 0.001 L/mim 0.01 L/mim Indication unit Voltage : V Instantaneous flow : L/min, CFH(ft 3/h) 2 Repeatability

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

(ANR)) Air flow rate (l /min (ANR)) AMG550 3 4 B AMG250 1 4 B Max. flow line Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMG650 1 AMG350 3 8B B Max. flow line Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) 14-20-4 3 Water Separator Series AMG Construction AMG150 to AMG650 AMG850

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 20 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 1.13-10 Series VQD1000 Dimensions Plug lead manifold unit(VV4QD15-ll) Lead wire length: 300mm Light 4-Rc(PT)1/8 SY (P, R port) ACB ACB ACB

EXxx-OMQ0015CN

4..20 mA +3.00+20.90 mA +3.10+21.00 mA .

Series CE1

Technical Data for Operation The instruction manuals should be read before using the Series CE1 scale cylinder and CEU1 3 point preset counter. 4.4-5 Stroke Reading Cylinder 12, 20, 32, 40, 50, 63 Series CE1 How to Order CE1 L 32 200 Mounting Number of auto switches Both ends tapped (standard) 2 Bore size B Auto switch S 1 12 20 32 40 50 63 12mm L F G D Without auto switch Foot 3 3 20mm

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

LG1H

For open collector method, it is 2 m or less. 103 Series LECSA Series LECSB Options Motor cable, Lock cable, Encoder cable LE-CSM-: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B S Axis side AC servo motor Counter axis side LE-CSB-: Lock cable Cable length (L) [m] Cable contents 2 5 M B E 2 5 Motor cable (11.8) Lock cable A 10 Encoder cable L (29.6) Cable type

SL5200

0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.