VZ3000

) (Lead wire length) VZ G: 300 mm H: 600 mm VF Bracket VFR VP4 VZS VFS (Mounting hole) (Mounting screw) (Mounting hole) VS4 (PE port) VQ7 EVS VFN (Piping port) L plug connector (L) VZ3120-L-M5 M plug connector (M) VZ3120-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3120-D-M5 Built-in One-touch fittings VZ3120--C4 C6 MAX. 10 C4

HRX-OM-W038

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Ejector Valve Unit, Series ZYY/ZYX

MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics -100 -100 -100 -100 Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Size Foot bracket Description Mounting screws included in foot bracket 50 CRA1L50 -Y-1Z M8 1.2535 Foot bracket 2pcs. 63 CRA1L63 -Y-1Z M10 1.540 Mounting thread4pcs. 80 CRA1L80 -Y-1Z M121.7550 Collar 4pcs. M121.7550 100 CRA1L100-Y-1Z After the foot bracket removed the mounting screws of the basic style, mount to the cover with the mounting screws included in foot bracket.

IZT40/41/42

Symbol Type Material D High speed de-ionizing cartridge Tungsten E Silicon L Energy saving type de-ionizing cartridge Tungsten M Silicon 2 u Plug position Symbol Position Nil Without plug Q High-voltage cable side R Opposite side of the high-voltage cable !

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

Air Cylinder NCM Series Stainless Steel Cylinders

-r I tt""d lii9;--1@_*_1aru" l . 6 l y ' | t Fiif_ilri v *r T f l l T r I L---+---J-J--fo O Series NCM Auto Switeh Mounting Position aAuto $vidr Placemer* dr|lsidrs D-85, 86 Type Front Nose Mounting type Auto switch Auta Swifuh Pkrcement Dfinensions 0.97 1.03 1 . 1 2 1.22 1.35 '( ) are for Front Nos Mounting type cylinders.

SJ3A6

Release pressure side filter y t r q e u w !

Flow Control Equipment

min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,

VZ5000

-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01

Multistage Ejector (N)ZL Series

Output specifications 25 (L) 26 (L) 67 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30V, 80mA or less ZSE4 ZSE4B Analog output (1 to 5V) 1 output PNP open collector 80mA or less Analog output (1 to 5V) ZSE4E 2 outputs NPN open collector 30V, 80mA or less 2 outputs PNP open collector 80mA or less Refer to CAT.E824-A "Pressure Switch" for details on switches. 6 Multistage Ejector

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

0.01

Clean Air Filter SFD Series RoHS Hollow Fiber Element HAA HAW Nominal filtration rating: 0.01 m (filtration efficiency 99.99%) AT IDF IDU Initial pressure drop: 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure: 1.0 MPa (at 20C) IDF FS IDFA IDFB SFD100 SFD200 SFD101/102 Made to Order Up to 100 L/min(ANR) Up to 500 L/min(ANR) Up to 100 L/min(ANR) IDH ID IDG IDK

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 8-9-16

Fieldbus system EtherCAT compatible SI Unit

(When L/A port1 LED is OFF.) LINK has not yet been established. L/A port1 or L/A port2 LEDs are OFF. (2) Check that the connectors of L/A port1 and L/A port2 communication cables are connected and there are no broken wires. (3) Keep noise sources away from the communication 9 cable.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

MHR3-10R/MDHR3-10 MHR3-15R/MDHR3-15 0.6 L L L L 0.6 Pressure ( MPa) Pressure ( MPa) 0.5 0.5 Gripping point 0.4 L: Distance to the gripping point 0.4 Internal grip 0.3 0.3 0.2 0 10 20 30 40 50 0.15 0.2 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Gripping point Effective Gripping Force Guidelines for the selection of the gripper with respect to workpiece mass Selection of

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13

For Water Digital Flow Switch Series PFW

min or l).]

ZSE1/ISE1

L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

flow, Vacuum (4W) L: Plug lead L plug connector, With lead wire and light and surge suppressor V U W (1) (1) Note 1) Power saver type LO: Plug lead L plug connector, Without lead wire and light and surge suppressor Rated voltage M: Plug lead M plug connector, With lead wire and light and surge suppressor 5 6 24V DC 12V DC Note) Consult SMC for other voltages.