Table of Contents

ISG121-030 ISG221-030 Stainless steel 316 None 0.02 to 0.35 Cable gland ISA2 ISG121-031 ISG221-031 Stainless steel 316 Yes 0.02 to 0.45 Type A IS ISG130-030 ISG230-030 Brass, Phosphor bronze None 0.03 to 0.4 20a ISG130-031 ISG230-031 Brass, Phosphor bronze Yes 0.03 to 0.6 20b ZSM 0.1 to 1.0 1.5 0.02 ISG131-030 ISG231-030 Stainless steel 316 None 0.03 to 0.4 20c PF2 ISG131-031 ISG231-031

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Property 65 or less Cable length (L) Conductor resistance /km, 20C AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Cable 25-core x 24AWG 10 Voltage limit V, 1 min, AC 1000 Cannot be used for transfer wiring.

XLA Series

Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V Exterior seal (3) Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal (2) Specific B2401-V15 ** B2401-V24 ** B2401-P42 ** AS568-227 ** Description Valve size Construction No.

XMD/XYD Series

Material 25 40 50 63 80 Standard AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V External seal (3) Specific AS568-030 ** AS568-035 ** AS568-039 ** AS568-043 ** AS568-045 ** Standard B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Valve seal (2) Specific B2401-V24 ** B2401-P42 ** AS568-227 ** AS568-233 ** B2401-V85 ** Standard XLD40-2-9-1A XLD50-2-9-1A XLD63-2-9-1A XLD80-2-9-

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Cable Assembly Electrical Wiring Specifications AXT100-DS25015 030 050 D-sub connector D-sub connector cable assembly can be ordered with manifolds. Refer to How to Order Manifold. As the standard electrical wiring specifications, double wiring (connected to SOL. A and SOL.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Bottom 1/2 D Sub Connector Kit (25P) Cable Assembly AXT100-DS25015 030 050 D sub connector cable assemblies can be ordered by inclusion with manifold part numbers. Refer to the section "How to Order Manifolds".

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Manifold Specifications Porting specifications Applicable stations Series Port size 1(P), 3(R) C6 4(A), 2(B) C3, C4, C6, M5 Port location Top VQ1000 Max. 16 stations U side D side 1 2 3 Stations D-sub Connector (25 pins) Cable assembly AXT100-DS25015 030 050 Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector cable assembly can be ordered individually or included

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D-sub connector cable assembly AXT100-DS25-030 2-position single 4-position dual 3-port valve (A) Cylinder port fitting port size C8: With 8 one-touch fitting 4 2 A Note) 1 F kit (D-sub connector) Coil voltage 1 5 3 Manifold base (8 stations) VV5Q21-08C8FU2 N.C.

SI Unit for Vacuum Manifold

Cable colour: Signal 1 Yellow : TD+ Connector M12 Straight M12 Straight 2 White : RD+ Cable O.D. 6.5 mm 3 Orange: TDNominal cross section AWG22 4 Blue : RDMin. bending radius (Fixed) 19.5 mm Fig. 9-4 EX9-ACxxxEN-PSPS -37No.EX-OMY0014-A (5) Cable with communication connector (M12 M12, Angle) Part number: EX9-AC 005 EN-PAPA Cable length (L) 005 500 [mm] 010 1000 [mm] 020 2000 [mm] 030 3000

SI Unit for Vacuum Manifold

Accessories (1)Cable with communication/power connector on both sides (M12 M12, Straight) Part number : EX9-AC 005-SSPS Cable length (L) 005 500 mm 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm Item Specification Pin No.

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 4) Refer to Options on p.1.10-161 for One-touch fittings in inch sizes. 1.10-124 VQ 1000/2000 Plug-in Unit Base Mounted SY SYJ SX VK Electrical Wiring Specifications D-sub cable ass'y VZ AXT100DS25 015 030 050 wire color table VF Polarity Terminal No.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 2) Note 4) Note 3) Note 4) 2-4-158 Base Mounted Series VQ1000/2000 Plug-in Unit D side U side VQC 1 2 3 Stations SQ VQ0 Electrical wiring specifications Circular connector cable assembly VQ4 015 030 050 AXT100-MC26Wire Color Polarity Terminal no.

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

High Vacuum L Type Valve

Valve size Valve size Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

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For details, refer to page 457. 456 Base Mounted Plug-in Unit VQ4000 Series P Electrical wiring specifications D-sub connector assembly 015 030 050 Standard wiring Wiring with control unit AXT100-DS25Wire colors D-sub connector Terminal no. Terminal no.

HRX-OM-W058

10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2 Pump capacity(HRS018/030-A-20-T-R) HRS-R Series 9.6 Pump capacity 9-9 HRX-OM-W058 Chapter 9 Documents 9.7 Compliance This system conforms to the following standards.