ZSM1-115/121

Hysteresis mode P. 879 P. 877 I U Input impedance Insulation resistance Internal voltage drop Unit conversion URJ P. 877 P. 879 V K Vacuum breaking pressure Vibration resistance Voltage resistance Key lock mode P. 877 P. 879 L W Leakage current LED level meter Liquid contact part Load Load current Load impedance Load lock chamber Load voltage Window comparator mode P. 879 Z P. 877 Zero out

15

Workpiece fixed/Plate tapped type Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 11 LEYG32M L M6 x 1.0 5.2 12 Tap (4 locations) Body fixed/Top mounting Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.5 LEYG32M L M5 x 0.8 3.0 50.5 2.

3-Position Rotary Table

P+0.1 0.1 QCR = V x x 10 3 (1) P 0.1 (2) QCP = a x L x x 10 6 Formula QCR = Amount of air consumption of rotary table [L(ANR)] Qc2 = Qc x n x No. of actuators x Margin rate QCP = Amount of air consumption of tube or piping [L(ANR)] V = Inner volume of the rotary table [cm 3] Qc2 = Amount of exhaust air from a compressor [L/min (ANR)] n = Actuator oscillations per minute P = Operating pressure

l

Load voltage Lead wire (m)* Auto switch model Indicator Applicable load Electrical entry Wiring (output) Style Special function 0.5 ( ) 3 (L) 5 (Z) None Tie rod Band DC AC 3 wire (Epuiv. to NPN) P P P P P P P P P P A56 IC 5V Yes No Yes Yes A53 A54 A67 A64 12V PLC Grommet 100V, 200V Relay, PLC 12V Reed switch Solid state switch P P IC 5V, 12V PLC 200V 12V Relay, PLC 2 wire 24V P P P A33 A34

CL

l Applicable bore size (mm) Part no.

IDX-OM-O004E

motor FM PRS P 132 14.

Series IRV10/20 Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1

3 Port Solenoid Valve

10.5 11.5 5 5 10 11.6 3 1 3 1 21.5 27 [34] 30.9 25 + + + + + (Mounting hole) 2-3.5 L2 3 (Port 1, 3) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 (Lead wire length) 32.4 [34.6] L1 34.6 (Indicator light and surge voltage suppressor) (n station) (1 station) 2 2 13 7.7 (Pitch) P=10.5 10.5 (Port 2) M5 x 0.8 L plug connector (L) M plug connector (M) 32.5 [34.7] 34.7 11.6 38.1 [45.1] 42 42.3 [44.5]

VCB

/min How to find the flow rate for water 5.0 Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) VCB 3 Cv = 0.35 3 4 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

/min How to find the flow rate for water 5.0 Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min VCB 3 Cv = 0.35 3 4 Formula based on effective area (Smm) 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24

Round Type Hydraulic Cylinder

Cotter pin 4 x 20 l (2 pcs.)

O

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

O

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

Square Tube Type Air Cylinder Series MB1

L (Example) Y69BL 5m .

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r a Non-contact construction w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tubes exterior surface and the slide tables internal surface. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a w t i o o n L No contact Cleaned, assembled, inspected

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

RSH

wire P P Y59B Y69B 12V p Solid state switch Relay PLC 3 wire (NPN) P P Y7NW Y7NWV Grommet p 24V Yes 5V 12V IC Diagnostic indication (2 color) 3 wire (PNP) P P Y7PW Y7PWV p P P Y7BW Y7BWV p 12V 2 wire Water resistant (2 color) P Y7BAL p P Available -Not available * Lead wire length symbol 0.5m () (Example) Y69B 3m L Y69BL 5m Z Y69BZ **Solid state auto switches marked with a "p" are manufactured

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !

AC Servo Motor Driver (Pulse input type/Positioning type)

Travel amount per 1 command pulse (P=10m) 1000 P: Travel amount per 1 command pulse [m] *1 n1/n2: Pulley ratio *2 Actuator lead (L = 6mm) Pulley ratio (n1/n2 = 1/1) [PA05] = 100 (Initial value) 1 [PA06] 10010010 1001000.01 1000 = = [PA07] 6 1/1 6 [PA06] 100 = [PA07] 6 *1 In case position control mode, "Travel amount per 1 command pulse"P = 10[um] In case positioning mode, "Travel amount per