Flow Rate Range: 1~10 l/min, Thread: Rc, Port Size: Port Size 1/8, Output Specification: PNP Open Collector 2 Outputs, Wiring Specification: 3m Lead Wire w/Connector, Unit Specification: Fixed SI Unit, Option: -

Flow Rate Range: 5~50 l/min, Thread: Rc, Port Size: Port Size 1/8, Output Specification: NPN Open Collector 2 Outputs, Wiring Specification: 3m Lead Wire w/Connector, Unit Specification: Fixed SI Unit, Option: -

Flow Rate Range: 5~50 l/min, Thread: Rc, Port Size: Port Size 1/8, Output Specification: PNP Open Collector 2 Outputs, Wiring Specification: 3m Lead Wire w/Connector, Unit Specification: Fixed SI Unit, Option: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8)

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Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Size: No.1, Orifice: 2 (3mm), Style: 0 (Normally Closed), Option: M (For Vacuum -- Seal: FKM, Body: Stainless Steel, Non-leak), Port Size: 01 [1/8 (6A)], Thread: N (NPT)

Size: No.1, Orifice: 2 (3mm), Style: 2 (Normally Open), Option: M (For Vacuum -- Seal: FKM, Body: Stainless Steel, Non-leak), Port Size: 01 [1/8 (6A)], Thread: N (NPT)

Size: No.1, Orifice: 3 (4.5mm), Style: 0 (Normally Closed), Option: M (For Vacuum -- Seal: FKM, Body: Stainless Steel, Non-leak), Port Size: 01 [1/8 (6A)], Thread: N (NPT)

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: BM (B + M), Semi-Standard 1: 6C (w/Bowl Guard, Nylon Bowl), Semi-Standard 2: RZ (R + Z)

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized