Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

FX D N MM H A AL 3 K Width across flats KA F FX ZZ + Stroke S + Stroke N (mm) B1 36 30 26 22 ND 20-0.033 0 34 31 31 27 H1 AL MM FX 32-0.039 0 7 5.5 5.5 5 K I H FF GB GC KA 22 22 GA ZZ S P N F D A 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 104 78 76 76 24 22 22 18 42.5 34.5 30 24 40 32 25 20 21 19.5 19.5 15.5 14 12 10 8 30.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 17

Modular Type Lubricators Series AL

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Modular Type Regulators Series AR

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

Possible to transfer a workpiece at low-speed.

Auto switch Size Built-in magnet 10 15 20 30 40 Nil D None Built-in magnet Refer to page 308 for the part no. of auto switches.

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

7

size L K (D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal Aluminum body type Stainless steel body T U T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U U V 22 27 55.5 (61) 27 42 (47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25

Compact Guide Cylinder Series MGQ

Auto Switch Mounting Height (mm) Auto switch model D-A9 D-M9 D-M9W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-A9V Bore size (mm) Hs Hs Hs Hs 12 16 20 25 32 40 50 63 80 100 16 18.5 20.5 17 18.5 21 23 19.5 19.5 22.5 24.5 20.5 21 23.5 26 22 24.5 27 28.5 25.5 24 26 27.5 25 28 30 31.5 29 34.5 36.5 39.5 35.5 44 46.5 48.5 45 52 54 56 52.5 350 Compact Guide Cylinder Series MGQ

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

Sine Cylinder Series REC

Auto Switch Mounting Height (mm) Auto Switch model D-B5 D-B64 D-B59W D-G5NTL D-H7C D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A9 D-M9 D-M9W D-C73C D-C80C D-A44 Bore size (mm) Hs Hs Hs Hs Hs Hs 20 24.5 27 62 72 24 27.5 25 27 29.5 64.5 74.5 26.5 30 32 30.5 33 68 78 30 33.5 40 35 37.5 72.5 82.5 34.5 38 REA REB REC CY CX MQ RHC RZQ D-X Individual -X 1039 Series REC Operating

3

Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT D-A7H D-A80H Auto switch model D-F7V D-F7WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9V D-A9V D-P3DWA Bore size U 25.5 28 36 38 43.5 48.5 U 25 28 28.5 32 37.5 42.5 U 23 26 26.5 30 35 40.5 U 27.5 30.5 26.5 40 45 50.5 U 30 32.5 39.5 42.5 48 53.5 U 24.5 27.5 34 37.5 43 48 U 31 34 40.5 43.5 49 54.5 U 28 31 37.5 40.5

51

) (n = 2, 4, 6) Note 3) D-H7 D-H7W D-H7BA D-H7NF (n 2) 2 70 + 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4,

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For detailed specifications, refer to page 8-30-1. Normally closed (NC = b contact), solid state switch (D-F9G/F9H/Y7G/Y7H type) are also available. For details, refer to page 8-30-31 to 8-30-32. D-A90 cannot be mounted on Series MY1HT. Electrical entry (Fetching direction) Type Model Features D-A90 D-Z80 Grommet (In-line) Grommet (In-line) Reed switch Without indicator light 8-12-24

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 30 23 Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) Dilute pure ethylene glycol with clear water. Additives such as antiseptics cannot be used.

MXH

114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22(24.5) D-A9 D-M9 D-F9W MX MTS W ( ): Denotes the values of D-A93.

MY1

/Y7PV D-Y7W/Y7WV D-Y7BA D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA 5 5 5 5.5 5.5 5 5 5 5.5 5.5 Perpendicular electrical entry type and D-Y7BAL cannot be mounted on 16, 20, 50 and 63.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Same side 120 75 90 (n 2) 2 (n 4) 2 120 + 50 (n 4) 2 20 + 50 90 + 50 Different sides n = 2 ,4 ,6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 D-B59W n = 2, 3, 4 90 + 50 (n 2) 120 + 50 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6 n = 2, 4, 6, 8 120 90 1 pc. 15 75 Different sides 90 80 35 Same side 100 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

Air Combination

AC20D-D to AC40D-D 30 03 DE AC D D Symbol Description Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 3/8 Port size 03 3/4 1/2 04 06 Nil Without auto drain a Float type C N.C. (Normally closed) Drain port is closed when pressure is not supplied. auto drain D N.O. (Normally opened) Drain port is opened when pressure is not supplied.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note