Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

ZP

Width across flats 12 r Buffer stroke t Vacuum inlet y Connection thread D C B 10 86 52 23 20 124 62 51 30 134 72 40 170 82 77 50 180 92 Width across flats 7 10 41 25 2.5 6 M10 x 1 14 3 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 N4 N6 U4 U6 A10 N S U F GN GS 16 42 26 E2 J K ZP Y D 10 93 59 23 Construction p. 118 14 3 20 131 69 51 30 141 79 40 177 89 77 50 187 99 25 48 30 3.5

Electric Actuator

Size Order no. 22 16 25 32 LE-D-2-1 LE-D-2-2 LE-D-2-3 $1 Component Parts No. Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

CJ2

/C80, D-C73C/C80C D-A7/A80, D-A7H/A80H, D-A73C/A80C, D-A79W D-F7/J79, D-F7V, D-J79C, D-F7W/J79W, D-F7WV, D-F7BAL, D-F79F , D-F7NTL, D-F7BAVL Reed switch D-H7, D-H7C, D-H7W, D-H7BAL, D-H7NF Solid state switch 6-3-1 2 Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 6, 10, 16 How to Order Bore size 6 10 16 Standard stroke (mm) 6 10 16 6 mm 10 mm 16 mm 15, 30, 45, 60 15, 30

24

With head end lock D-M9 D-M9V D-M9W D-M9WV D-Z7 D-Z80 D-Y59 D-Y69 D-M9A D-M9AV D-A9 D-A9V D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch Auto Switch Proper Mounting Position [mm] *1 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW Bore size A B A B A B A B A B 20 9 38 5 34 4 33 25 9.5 38 5.5 34 4.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

66 50.5 75.5 41 66 30 30 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 101.5 92 51.5 76.5 42 67 51.5 76.5 42 67 33.5 33.5 17 126.5 126.5 40 40 119 119 31 106 94 56 81 44 69 56 81 44 69 38 38 19 131 131 20 20 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 27.5 27.5 17.5 25 25 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 30 30 127 127 17.5 117.5 117.5 D-B59W D-B59W 32 32 28 103

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

D LEC-CSNA-1 11.1 Product no.

MB

25 25 30 2 (Different sides or Same side) 15 C85 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 30 + 55 n = 2, 4, 6, 8 n (Same side) D-F5NTL C95 1 10 25 30 2 (Different sides or Same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 15 CP95 (n2) 2 15 + 40 n = 2, 4, 6, 8 n side NCM 2 (Different sides or Same side) 1 10 D-Y69 D-Y7PV D-Y7WV NCA (n2) 2 10 + 30 n = 2, 4, 6, 8 n D2 (Different

LJ1H

Limit switch 10 20 30 None B contact specification 2 pcs.

Vacuum Pad

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

Vacuum Pad

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

Vacuum Pad

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

Vacuum Pad

) Rc1/8 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) 20 29.5 25 6 6 60.5 25 6 6 4 x M5 x 12 59.5 70 F (G) 19 28.5 F (G) 50 Y X Y X 4 x M4 x 10 30 30 E B A D 34 4 E B A D 40 4 Dimensions Dimensions B 65 83 ZP2-TF63HB ZP2-TF80HB Model D 46 58 A 63 80 E 68 85 F 31.5 37 G 91 96.5 X 40.6 46.1 Y 21 27.5 B 103 129 ZP2-TF100HB ZP2-TF125HB Model D 69 89 A 100 125 E

CL

D C B H d Tube I.D.

Combination Cylinder

(mm) B C D d H Dd9 Tube dia. (mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Table of Contents

AL 14-2-31 32 Series AC How to Order AC 30 A F 03 D A KV 12R X465 Switch specifications F.R.L. unit Symbol A B C D Output specifications NPN output PNP output 1 to 5 V output 4 to 20 mA output Body size 20 25 30 40 50 55 60 Model combination Combination With digital pressure switch (Series ISE30) (12) Symbol Filter Regulator Mist Separator Air filter Lubricator Regulator Nil A B C D Note

Cylinder with Lock

12, 16)*2 2 (Different surfaces, same surface) 1 50 55 60 65 70 D-M9mV D-M9mWV n 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 80 85 95 100 D-M9mA n 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n

LX

C 30 D Refer to page 300 for mounting.

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

Air Cylinder Series CS1

) 1 120 20 115 D-M9AL 115 + 40 (n2) 2 120 + 40 (n2) 2 (n = 2, 4, 6, 8 ) 20 + 40 (n2) 2 n (n = 2, 4, 6, 8 ) (n = 2, 4, 6, 8 ) 2 (Different surfaces, Same surface) 1 95 15 90 D-M9AVL 90 + 30 (n2) 2 95 + 30 (n2) 2 (n = 2, 4, 6, 8 ) 15 + 30 (n2) 2 n (n = 2, 4, 6, 8 ) (n = 2, 4, 6, 8 ) D-A5/A6 D-A59W D-F5/J5 D-F5W D-J59W D-F5BAL D-F59F 2 (Different surfaces, Same surface) 1 125 25 150 135 150