High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

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Holes vns 20/30/40/50 Cornbination with a ,noduta. sayle FBL :;t.ti:l Combination with a modular style AC20 Ac:t0 VHS2O VHS3O VHS4O VHS5O An nterface pad is required attached 1o a modular FRL.

Bag Filter

With a nominal filtration accuracy of 50 m, the model selected is the FGFS1A-20-E 050 B. e Selecting filtration accuracy Filtration accuracy [Required filtration accuracy] Select the required filtration accuracy depending on conditions. to Nominal filtration accuracy: 5 m Nominal filtration accuracy: 100 m Filtration accuracy = Nominal filtration accuracy FGF1-20-E 005 B FGF1 B -20-E 100

Series CE1

121 5.8 9.2 6.6 42 24 3.2 96.4 48 66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 4.4-11 Series CE1 Dimensions 32, 40, 50, 63 Both ends tapped CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F L X C B + Stroke Z M E A + Stroke T 2-P Q I (Port size) Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 X 1 38 (mm) A B C D E F G H I J K Bore size

Digital Gap Checker

ISA3-F ISA3-G ISA3-H Piping length: 1 m Piping length: 1 m Piping length: 1 m Piping length: 3 m Piping length: 3 m Piping length: 3 m Piping length: 5 m Piping length: 5 m Piping length: 5 m -18No.PS-OMT0002-E 2 About this product Response time Response time is the elapsed time between the pressure supply and the turning ON of the switch output.

MGF

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

F/ISE

2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55

Rotary Table

deg) m(deg) 1 190 20.9 49 10 16.9 20 10 2 190 22.8 50 10 18.8 20 10 3 190 24.4 47 10 20.4 15 10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

80

/Single Unit Body material Brass 2 x 3.4 Mounting hole W Y Grommet X U 300 Q F D Full wave rectifier (AC type) C R [mm] 1 E G Mounting method Model Port size P B B1 C D E F J K M 2 x P Port size B B1 VDW1 M5 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 22 11 51.7 20 8 13.5 M3 5 15 Mounting bracket dimensions (XD) Electrical entry M Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17

CM2

D-A3A/A44A/G39A/K39A/B54 cannot be mounted on bore sizes 20 and 25 cylinder with air cushion. Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed above, refer to page 6-4-24 for details.

Digital Flow Switch

4 x 2.6 Depth 7 or less (7.7) 30 20 Power supply/Output connector Bracket A (Part no.: ZS-46-A1) 30 25 20 20 20 45 30 2 30 34.6 19 5.2 5.2 5.2 14.7 47 9.6 Bracket configuration allows for mounting in four orientations.

Pin Clamp Cylinder Series CKQ/CLKQ

Lead wire length Model 0.5 m D-LC05 CD-P11 OUT Brown 3 m D-LC30 Surge absorber Choke coil ~ 5 m D-LC50 OUT Blue Auto Switch Hysteresis Choke coil CD-P12 OUT (+) Brown Hysteresis is the distance between the position at which piston movement operates an auto switch to the position at which reverse movement turns the switch off.

Compact Cylinder with Solenoid Valve/

and case) Withstand voltage 10 to 60C Ambient temperature Enclosure IEC60529 Standard IP67 Lead Wire Lead wire length indication (Example) D-M9BW L Lead wire length Nil M L Z 0.5 m 1 m 3 m 5 m Note 1) Lead wire length Z: 5 m Applicable auto switches Solid state auto switch: Manufactured upon receipt of order as standard.

AC Servo Motor Driver (MECHATROLINK-II type)

30 20 10 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-III type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

For details, refer to page 8-30-32. 8-29-10 11 Dual Rod Cylinder: With Air Cushion Series CXS 20, 25, 32 How to Order MX Thread type MTS Symbol Type M Rc NPT G Bore size (mm) 20 MY Nil 25, 32 TN TF CY CXS M 100 S A 20 Y7BW MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

VQ7-6/7-8

Precautions Insert and pull out the connector in a straight line so that it does not tilt at an angle.

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

C95

30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ 1.11-31 Series C95 Refer to P.5.3-17, 27, 37, 46, 54, 58 and 61 for details on auto switches.

Transfer

Incremental type 14.5 mT 10.8 to 13.2 VDC (Ripple 1% or less) 40 mA 0.1 mm/pulse 0.2 mm Note) (at 20C) NPN open collector (35 VDC, 80 mA) A/B phase difference output 50 M or more (500 VDC measured via megohmmeter) (between case and 12E) 33.3 Hz, 2 hours at X, Y and 4 hours at Z JIS D 1601 as standard 30 G, 3 times at X, Y, Z IP50 (IEC standard) Extension cable (Option) 5 m, 10 m, 15 m, 20