SMC Corporation of America
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NBR Cushion seal O-ring NBR 6 Clean Room Rodless Cylinder Series CYP Dimensions (mm) 1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 12 16 16 20 20 25 49 58 71 87 110 136 TY TX TZ TT 1.7-29

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol E T P U Combination 1 2 3 4 5 6 Tube Size (Inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Style Elbow Union Tee Union Panel Union Straight Union A A A A A A Series LQ3 Dimensions Straight

Going to Great Lengths with Polyurethane Tubing L G O B A S L N O P I R T O U D L O U S C T L S A B O G L Polyurethane Tubing Series TIUB & TU SMC Offers a Rainbow of Tubing Types, Colors, Sizes and Lengths Polyurethane has 8 Quick Ship colors, equalling 336 part numbers, stocked on the shelf and ready to ship in all available sizes and lengths.

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Time t (ms) t (ms) (Averaging) (Averaging) Switch output operation when normal ON [Selectable response times: t] 2.5ms (normal), 24ms, 192ms or 768ms The normal setting is selected when shipped from the factory.

Time t (ms) t (ms) (Averaging) (Averaging) Switch output ON operation [Selectable response times: t] 2.5ms (normal), 24ms, 192ms or 768ms The normal setting is selected when shipped from the factory.

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume

A MPa ON kPa OUT1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OFF OUT2 CH 1 2 3 4 PRESSURE Min. B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when workpiece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min.

Cylinder ports are NAMUR hole pattern. 3-12-4 5 NAMUR Interface 5 Port Solenoid Valve Series VFN2000N/3000N NAMUR Mounting Pattern Axis A-A' can be aligned to suit. A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud.

Symbol EA, EB Side Side A, B Side P F 0 Side Side 2 Option 1 9 Bottom Others Manifold type Type V N Type E E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.