Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

JIS Standard Hydraulic Cylinder

4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 125 140 150 2 (Different surfaces), 1 130 160 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 125 + 55 140 + 55 150 + 55 130 + 55 160 + 55 D-F5NT n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 15 110 125 135 2

JXCx-OMT0001CN

LKRLS1 EMG2 EMG1 C 24V (24V) (0V) CI 3 4 LKRLS4 LKRLS3 EMG4 EMG3 C 24V EMGx OFFOV -41No.JXC-OMT0001CN-C () M24V EMG () (0 V) DC24V Ry Ry U M PWR 1 2 Ry M 24V (24V) (0V) (0V) M PWR 3 4 M 24V (0V) CI 1 2 LKRLS2 LKRLS1 C I 3 4 EMG2 EMG1 C 24V CI 3 4 LKRLS4 LKRLS3 EMG4 EMG3 C 24V (1) M24V EMG (2)M24V(SETUP ON) (M24V) (3)EMG1 EMG4 -42No.JXC-OMT0001CN-C 7.

EX120/121/122

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Digital Gap Checker ( compatible)

Description 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1(C/Q) -35No.PS-OMW0009-C 3 Installation Connector pin No. (Lead wire side) Connector pin No.

Compact 5-Port Solenoid Valve

4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

Table of Contents

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 L2 = 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 11-4-16 82 Simple

Parallel Style Air Gripper Series MHZ

the auto switch at the square groove. 420 Long Stroke Type/Series MHZL2 Finger Option Through-holes in Opening/ Closing Direction [2] Side Tapped Mounting [1] 4 x MM through (Thread for mounting attachment) C C B A 4 x H through (Hole for mounting attachment) S S O B A O (mm) (mm) Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 Model A 3 4 5 6 B 5.7 7 9

Air Cylinder

D-X Technical Data 321 CG1 Series Basic Spring return: CG1BN Width across flats KA Plug with fixed orifice GA F GB RcP MM H1 R0.4 D I E 0 0.05 E 0 0.05 C R0.4 H A AL TA K 4 x TC Width across flats B1 8 J ZZ + Stroke S + Stroke F TB NA C Spring extend: CG1BN Width across flats KA GB Plug with fixed orifice RcP GA F MM H1 R0.4 D I E 0 0.05 E 0 0.05 C R0.4 H + Stroke A AL K TA 4 x TC F TB Width

Refrigerated Thermo-chiller

20 30 40 Circulating fluid temperature (C) 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) HRZ002-W/008-W 9 HRZ008-W 8 Cooling capacity (kW) 7 6 5 4 HRZ002-W 3 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Heating Capacity HRZ001-L/002-L/004-L/008-L HRZ001-H/002-H/004-H/008-H 4 7 6 HRZ008-H HRZ004-H Heating capacity (kW) Heating capacity (kW) HRZ008

Thermo-chiller/Rack Mount Type

4 i !5 !9 !6 !7 @0 @1 !8 No.

A_HEC-OM-K001

3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function . 3-6 Chapter 4 Installation . 4-1 4.1 Installation, Transport and Transfer . 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.1.4 Installation . 4-2 4.2 Piping . 4-3 4.2.1 Preparation of Facility Water . 4-4 4.2.2 Preparation of Recirculating

Auto Switch Guide

C J G5-S 2.7 4 2.8 Most sensitive position 6 2.8 22 500 (3000) 20 2.7 CV OUT Black 3.2 2.6 DC () Blue MVGQ 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV CC Precautions OUT (+) Brown RB Be sure to read before handling.

IMPACT BLOW GUN

after R thread installation R1/4 L [mm] Part no.

Tie-rod Type Hydraulic Cylinder

size 63 21 32 32 22 6 63 all types 80 65 20 30 16 M18 x 1.5 18.3 4 4 x 28AW M D L 80 26 40 36 27 7 80 all types 100, 125 all types 95 78 22 35 16 M22 x 1.5 22.3 4 4 x 36AW 100 34 45 40 32 8 110 90 26 42 20 M27 x 2 27.5 5 5 x 40AW l 45 160 all types 160 43 50 44 36 10 120 100 30 50 22 M33 x 2 34 5 5 x 50AW 10 K C F B A H 0 0.2 Material: Carbon steel Y-type knuckle d (H8) A B C D G L F E K

CL

56.5 20 21 23 23 25 14 18 18 22 26 45 50 60 70 80 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 106.5 125.5 139.5 CLAG40SCLA40, #4 (#1+#4+#11) CLAG50SCLA50, #4 (#1+#4+#11) CLAG63SCLA63, #4 (#1+#4+#11) CLAG80SCLA80, #4 (#1+#4+#11) CLAG100SCLA100, #4 (#1+#4+#11) Single Clevis/CLAC (mm) Stroke range (mm) Bore (mm) CX GB BP BQ C GC

Combination Cylinder

800 601 to 1000 1001 to 1200 601 to 1000 1001 to 1200 751 to 1000 1001 to 1400 751 to 1000 1001 to 1500 30 40 45 50 76 92 112 136 Long stroke (50 to 100) 50 63 80 100 (mm) Stroke range (mm) Bore (mm) GR GL GD GC GB GA F E D C BQ BP BN B1 B AL A Without rod boot With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 40 50 63 80 100 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4