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VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157

Output mode Display resolution Hysteresis mode 1/10 of P_1(n_1), P_2(n_2) Window comparator mode 1/4 of P1HP1L(n1Hn1L), P2HP2L(n2Hn2L) Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric pressure Compound pressure: Rated maximum pressure 1/4 of the atmospheric pressure Error output Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

One way roller lever VZM450-01-02 VZM450-01-02S 14 polyacetal or head steel roller (Pilot exhaust port) JIS Symbol 0.5 MPa supply 2.4 mm P.T. 7 N F.O.F. 4.6 mm O.T. 2-3.5 mounting hole 7.0 mm T.T. 5-6-37 Series VZM400 Series VZM400 Straight plunger VZM450-01-05 Panel mounting hole Hexagon nut thick 8, across flats 22 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F.

BIT 4 Stp-No.bit3 (7) 20 Step designation BIT 5 Stp-No.bit4 (20) 8 BIT 6 Stp-No.bit5 (8) 21 BIT 7 Stp-No.bit6 (21) 9 Stp-No.bit7 (9) 22 SET-ON 10 Temporarily stops the program run by means of the ON input. (3) Temporary stop HOLD READY 23 BUSY < 2 > 11 (16) Emergency stop (nonlogical input) Performs an emergency stop when ON input stops.

Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02

(Refer to the Operation Manual.) 7 Compact Vacuum Unit Series ZB Construction !3 u w q e i !4 !5 r t y !2 !2 o !

9 8 7 6 HEC012-W2l Power connector (AC) DDK CE05-2A18-10PD-D or equivalent Pin No.

Construction/ Main Parts 1 3 4 5 7 2 Main Parts Description Solenoid coil Body Fixed iron core Movable iron core ass'y Return spring Poppet Phillips/ordinary round head screw Interface gasket Subplate No. 1 2 3 4 5 6 7 8 9 Note Material Resin SUS SUS Resin SUS NBR Carbon steel NBR ZDC 6 8 AXT632-7-3 (M1.714) AXT782-11 AXT662-11 (1: M5,2:M3) 2 9 P A R 14 Operation Guide Series VQ100 Operating

switch 0 to -101 Output 1 to 5V, accuracy +/-2%F.S. or less Note 7) P1 Pressure sensor P3 -100 to 100 Output 1 to 5V, accuracy +/-2%F.S. or less Note 7) Unit conversion function Note 8) EA NPN2 EAM Fixed to SI units Note 9) output EAP Unit conversion function [Initial value PSI] Note 8) 0 to -101 Unit conversion function Note 8) EB PNP2 EBM Fixed to SI units Note 9) output Pressure EBP Unit

0.5~7 ()+ 43.602 0.5~7 -85No.PS-OMU0008CN-D () 1~5 -86No.PS-OMU0008CN-D ()+ 1~5 -87No.PS-OMU0008CN-D () 2 (n ) <> 31n +3.5n -1 -88No.PS-OMU0008CN-D <> -89No.PS-OMU0008CN-D () 2 (n ) <> 36n +4n -1 -90No.PS-OMU0008CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5,298 5,362 URL https:

3 58 Ass'y Assy Assy SY3000-37-80A-5 A 18 21,32SA SS5YJ3SY3000-37-80A-2 B SY3000-37-80A-7 A 916 SY3000-37-80A-4 B SY3000-37-80A-5 A 18 SY3000-37-80A-2 B 20,40, 42,43SA SS5YJ5SY3000-37-80A-7 A 912 SY3000-37-80A-4 B SY3000-37-80A-9 A 1316 SY3000-37-80A-7 B SY3000-37-80A-7 A 18 SY3000-37-80A-3 B 21,41SA SS5YJ7SY3000-37-80A-10 A 912 SY3000-37-80A-6 B SY3000-37-80A-12 A

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

. -10No.PS-OMM0003-J Definition and terminology Terms Meaning 2 2-colour display 2 colours are used to indicate a value, which change according to the output status. 7 7-segment display When "8" is shown on the display. It is called 7-segment because 8 consists of 7 pieces of "(segments)". A Analogue current output Refer to "Analogue output (function)".

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) System error (Er0, 4, 6, 7, 8, 9) is displayed. Check if there is a noise source nearby. (2) Check if the power supply voltage is in the range 12 to 24 VDC. (2) Supply power in the range 12 to 24 VDC.

A3 A5 DC motor (cylinder size 3) DC motor (cylinder size 5) Option Cable for power supply terminal LC3F2 1 C1 02 1 CN1 Power Supply Terminal Table 2 3 1 Optional cable color Terminal Function Pin number Cable type Cable length 01 02 1 m 2 m Yellow/Green FG Frame ground 1 Cable for CN1 power supply terminal C1 Cable length 60 5 60 5 2 Brown DC (+) Driver power supply (+24 V) Cable for

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation