PSxx-OMU0008CN

2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF

Speed Controller with Uni One-touch Fitting AS Series

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

ZL3-OM00601

Instruction Safety cannot be assured in the case of an unexpected malfunction. 4 Doc.

Ionizer

Ion polarity Switch setting Positive ion emission 8 Negative ion emission 9 4) Wiring of power supply cable Connect the dedicated power supply cable.

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

ZL3-OM00801

H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5)

Vacuum Ejector Series ZM

4 ZY ZF Component Parts No.

4-channel Flow Monitor (Remote type monitor unit)

Description Wire 2 DC(-) Blue cable 3 CH1_OUT1 Black 1 DC(+) Brown 4 N.C. White 2 N.C. 5 CH2_OUT1 Grey 3 DC(-) Blue 6 CH3_OUT1 Red 4 Sensor input (1 to 5 V) White 7 CH4_OUT1 Green 8 N.C. Yellow with PF3W5 Pin no.

PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

Compact Vacuum Unit Ejector/ Vacuum Pump System

. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

Quick Exhaust Valve Series AQ 1

1/4" 13.2 7.1 22.2 15-12-4

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-l02 : E4-l03 : E4-l04 1 4 3 8 1 2 1 4 1 2 : E6-l06 : E6-l10 3 4 1 : E5-l04 : E5-l06 : E3-l02 : E3-l03 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) l in the gauge part number (e.g.

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

Pressure Relief 3 Port Valve with Locking Holes

Dimensions Standard specifications Model P1 P2 A B C D E F G H J Single Double VHS20-D 1/8, 1/4 1/8 48.5 51.7 23 40 37 28 42 17.5 40 21 VHS30-D 1/4, 3/8 1/4 55 58.2 32 53 49 38 53 20 53 26.5 VHS40-D 1/4, 3/8, 1/2 3/8 69.7 73.9 41.3 70 63 52 71 29 70 35.5 VHS40-06-D 3/4 1/2 71.7 75.9 43.3 75 63 52 71 29 70 35.5 VHS50-D 3/4, 1 1/2 86.5 90.7 44.5 90 80 72 90 33 90 45 Options specifications With

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

Speed Controller with One-touch Fittings

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 10, 12 8 6 6 10 2 Flow Direction Symbol on Body Tube O.D.

Air Catch Sensor

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Digital Pressure Switch

Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2" and "H_2".