Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 530, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 600, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 700, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 850, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 900, Max. Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 70, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 44, Table Size Height H(mm): 44, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

HRX-OM-Z002

Ensure there is enough space for maintenance. 500 mm or more 300 mm or more 300 mm or 800 mm or more 800 mm or more more Fig. 3-5 Installation space HRLE Series 3.2Installation 3-7 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3 Installation Procedure 3.3.1 Installation procedure Install the product on a level, vibration-free floor.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

JXCx-OMT0023

Do not change this value by any means. 000h PC31 200 PC32 300 PC33 500 PC34 800 13 78 13. POSITIONING MODE No.

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

MLGC

stroke (mm) Bore size (mm) Model Data Slide bearing 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Auto Switch Mounting Bracket Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800