Vacuum Pad Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) Rc1 4 Flow metter Prepare a flow metter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 3.4 Piping HRS Series 3-28 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.5 Circulating Fluid Supply 3.5.1 Automatic water fill function When clear water is used, refer to 7.1 Quality Control
) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.
Table 1 Tightening torque ( Unit: Nm ) Foot Flange Plug bolt Cushion valve Cushion valve (Lock nut) Bore size (mm) (Valve retainer) 20 1.5 2.0 0.5 25 2.9 2.0 0.5 32 2.9 2.0 0.5 40 4.9 2.0 0.5 50 11.8 5.0 1.0 63 24.5 5.0 1.0 80 24.5 20.0 2.0 100 42.2 20.0 2.0 6.
Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)
(For details, refer to "Specific Product Precautions 1" on Page 11.) 26.5 Bushing assembly 2.7 Note) For dimensions of the cable connector, refer to single unit on page 6. 7 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Manifolds 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 L2 Port position L1 25 No. 9.5 9.5 z x c 1 3 5 ITV00 EXH SUP OUT ITV009 PWR PWR PWR PWR ATM
Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 400mm, Motor Option: B (w/Lock), Rod End Thread: M (Male), Mounting: Both Ends Tapped (Standard), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O
Length: 5 (5m), Controller Type - LEC, JXC: 1P (LECP1, PNP, Programless Type), I/O Cable Length for LEC: 5 (5m), Controller Mounting: D (DIN Rail)
: C6H (Parallel I/O, PNP), Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable: 5 (5m)
Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: B (with Lock), Guide Option: w/o Guide, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Controller Type for (LEC, JXC): C61 (JXC61, Parallel PNP, Step Data Input Type
Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: AN (LECPA, NPN, Pulse Input Type), I/O Cable Length for LEC: 5 (5m)
Size: 32, Motor Mounting Position: Top Mounting, Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 500mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R5 (5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 5 (I/O Cable, 5m)
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): 1P (LECP1, Programless Type, PNP), I/O Cable Length for LEC: 5 (5m), Controller
Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32/40, 4), Stroke: 350mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 5 (5m), Controller Mounting: Screw Mounting, Communication
L (Example) R73CL 5m .
NmISE75(H)80 Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP
Cable Length: 5 (5m), Controller Type - LEC, JXC: 1N (LECP1, NPN, Programless Type), I/O Cable Length for LEC: 5 (5m), Controller Mounting: D (DIN Rail)
Size: 32, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D (In-line), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 50mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 5 (I/O Cable, 5m)
), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: 6P (LECA6 PNP, Servo Motor, Step Data Input Type), I/O Cable Length for LEC: 5 (5m)