10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?

Compact Cylinder

Note 2) Lead wire length tolerance Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m 90 mm 3 m 150 mm 5 m 11 Prior to Use Auto Switches Common Specifications 2 Specific Product Precautions Refer to Auto Switch Common Precautions in "Handling Precautions for SMC Products" (M-E03-3) before using auto switches.

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa Supply pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 ARJ 0.202 0.15 Set point AR425 to 935 0.3 0.200 0.1 0.2 AMR 0.198 0.05 0.1 ARM 0.196 ARP 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

Step Motor Controller (Servo / 24 VDC)

RESET Ctrl Comm ALM (1-150) D SVON Do not remove the cable during operation by the controller setting kit or teaching box. Input *1) Abnormality in communication with the encoder. Encoder ALM (1-192) E Power off Check the connection of the actuator cable. Unable to find the motor phase within the set time.

Rotary Actuator

9 15 30 10 20 47 19 28 90 25 38 150 43 203 43 203 3 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type, except for standard shaft type.

AWM20 to AWM40

2) 5 to 60C (with no freezing) AWM20 to AWM40 0.3 m (95% filtered particle size) Nominal filtration rating AWD20 to AWD40 0.01 m (95% filtered particle size) AWM20 to AWM40 Maximum 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 3) Note 4) Outlet side oil mist concentratio AWD20 to AWD40 Max. 0.1 mg/m3 (ANR) (Before saturated with 0.001 mg/m3 (ANR) or less 0.008 ppm) Note 3) Note 4) AWM20 to AWM40 330 150

AWM20 to AWM40

2) 5 to 60C (with no freezing) AWM20 to AWM40 0.3 m (95% filtered particle size) Nominal filtration rating AWD20 to AWD40 0.01 m (95% filtered particle size) AWM20 to AWM40 Maximum 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 3) Note 4) Outlet side oil mist concentratio AWD20 to AWD40 Max. 0.1 mg/m3 (ANR) (Before saturated with 0.001 mg/m3 (ANR) or less 0.008 ppm) Note 3) Note 4) AWM20 to AWM40 330 150

Check Valve Series AK

Check Valve Series AK Large flow capacity Low cracking pressure: 0.02 MPa A wide variation of models Model Model Effective area (mm2) Port size Weight (g) 1 8 AK2000-01 25 105 1 4 AK2000-02 27.5 100 1 4 AK4000-02 47 155 3 8 AK4000-03 85 150 1 2 AK4000-04 95 140 3 4 AK6000-06 200 345 AK6000-10 230 315 1 Specifications AS Fluid Air Proof pressure 1.5 MPa ASP Maximum operating pressure 1 MPa

Modular Type Air Filters Series AF

0.10 0.10 0.10 P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.08 0.08 0.08 P1 = 0.5 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.3 MPa Pressure drop (MPa) P1 = 0.3 MPa P1 = 0.1 MPa 0.06 0.06 0.06 P1 = 0.1 MPa P1 = 0.3 MPa 0.04 0.04 0.04 0.02 0.02 0.02 0 0 2000 1000 3000 4000 Flow rate (l/min (ANR)) 00 00 500 1000 1500 Flow rate (l/min (ANR)) 50 100 150

Speed Controller: Standard Type Series AS In-line Type

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

2/3 Port Valve for Various

VXP2140 Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A b 39 45.5 49.5 e 57 62 67 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) a 34 51 58 d 47 52 57 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

temperature of 25 3C) Display accuracy Operation indicator light Lights when ON, OUT1: Green, OUT2: Red Enclosure IP40 Ambient humidity range Operating/Stored: 35 to 85% RH (with no condensation) Environmental resistance Withstand voltage 1000 VAC for 1 min. between live parts and case 50 M or more (at 500 VDC) between live parts and case Insulation resistance Vibration resistance 10 to 150

58

Grease pack part number: GR-L-005 (5 g), GR-S-010 (10 g), GR-L-150 (150g) Nickel plated Carbon steel Piston nut 11 Nickel plated Carbon steel Flat washer 12 Resin Wear ring 13 Magnet 14 Phosphate coded. Spring steel Retaining ring 15 NBR Rod seal 16 Cushion seal Urethane 17 NBR Piston seal 18 Dimensions NBR Valve seal 19 External dimensions are the same as the CS2 standard type.

3

Flow-rate Characteristics (Pressure Loss) PF3W711/511 PF3W721/521 0.04 0.04 Pressure loss [MPa] Pressure loss [MPa] 0.03 0.03 0.02 0.02 0.01 0.01 0 0 0 20 40 60 80 100 0 50 100 150 200 250 Flow rate [L/min] Flow rate [L/min] Straight Piping Length and Accuracy (Reference Value) Pressure: 0.3 MPa PF3W711/721/511/521 Piping diameter: 25A, 30A Straight piping length p10 p8 Accuracy [% F.S.]

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Standard Strokes (mm) Bore size Standard stroke Note1) Maximum manufacturable stroke Note 2) 1 Cylinders with rubber bumper have no bumper. 2 Only compatible with cylinders with rubber bumper, but has no bumper. 20 25, 50, 75, 100, 125, 150, 200 201 to 1500 25 32 40 50, 63 80 100 25, 50, 75, 100, 125, 150, 200, 250, 300 301 to 1500 Refer to pages 355 to 361 for cylinders with auto switches

Low Profile Slide Table Series MXF

40 80 120 240 200 160 200 50 100 150 200 0 0 0 Load (N) Load (N) Load (N) D-X Individual -X 139 Series MXF Construction !

3 Port Solenoid Valve

Response time (DC) (ms) Note 1) ON: 5 or less OFF: 4 or less 20 Max. operating frequency (Hz) Manual override Non-locking push, Locking slotted Not required Lubrication Unrestricted Mounting position Impact/Vibration resistance (m/s2) Note 2) 150/30 Dust proof Enclosure Note 1) Based on dynamic performance test JIS B8374-1981 (standard type: at coil temperature of 20C, with rated voltage,

m(150 mesh)149 ?m(100 mesh)74 ?m(200 mesh)105 ?m(150 mesh)149 ?m(100 mesh)FH990-08/10EM620-074NEM620-105NEM620-149NEM330-074NEM330-105NEM330-149N?82 x 133

° F (4° - 66° C), Activation Set Point: Fixed at 7 PSI, Max Pressure: 150 PSI No Negative Pressure Allowed, Switching Tolerance: ±1 PSI, Weight: 18 grams

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.