Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Micro Mist Separator

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter 8) Pipework for auto drain discharge which rises higher than the auto drain outlet should be avoided.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VAC, 50/60 Hz; 24 VDC 15 to +10% of rated voltage Class E or equivalent (120C) (5) Inrush Holding 4.5 VA/50 Hz, 4.2 VA/60 Hz 3.5 VA/50 Hz, 3 VA/60 Hz 1.8 W Plug-in type (FZ) Non plug-in type Grommet (G), Plug connector (L, M, KZ) DIN terminal (D) Apparent power (AC) Power consumption (DC) Electrical entry Note 1) Use dry air at low temperatures.

VVXA21/22

132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Trimmer Auto Switch

connector) Outside diameter [mm] 1.0 Conductor Effective area [mm 2] 0.15 (AWG26) Note) The connector for sensor (e-con connector) is not attached to the lead wire.

Pin Clamp Cylinder Series CKQ/CLKQ

F Pin hole a side a side Mounting tap: M12 x 1.75 Pin diameter: 10H7 Port Body (mounting side) C Port a side ( side) b side ( side) b side Clamp arm positioin (clockwise from top) Port a side : Mounting tap : Pin diameter : Mounting tap : Pin diameter D 180 from port Same direction as port b side Guide pin Port E 66 Port b side A C E Clamp arm Guide pin Clamp arm Port a side Mounting hole

Clean Air Module

Bushing e Check that the connecting brackets B (at two positions) are attached, and insert the bushing projection of the pressure outlet port assembly into the indent of the air operated valve assembly. Similarly, insert the end plate assembly into the pressure outlet port assembly.

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

EXxx-OMV0018_ENG

Note 1: ON/OFF 50 ms flashing Note 2: ON 200 ms single flash, OFF 1 s Note 3: ON/OFF 200 ms double flash, OFF 1 s Note 4: ON/OFF 200 ms triple flash, OFF 1 s Note 5: ON/OFF 200 ms flashing Safety Instructions Installation Setting Troubleshooting Warning General instructions on installation and maintenance Technical documentation giving detailed troubleshooting information can be found on

A-HEC-OM-J004

Table 4-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (s/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

VT317

Lead Wire Color (Grommet) Voltage 100 VAC 200 VAC DC Other Color Blue Red Red (+), Black () Gray Electrical Connection DIN terminal is connected inside as in the figure below. Connect to the corresponding power supply. Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

VXZ

B N.O. 1/2 G 15 With surge voltage suppressor C 110 VAC Stainless steel D 200 VAC 5 20A H C37 N.C. 3/4 20 E 230 VAC C N.O. J Stainless steel F 24 VDC 6 25A N.C. K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

Compact Vacuum Ejector Series ZA

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 850 Compact Vacuum Ejector Series ZA How to Order 08 ZZA1 3 P Manifold Right common air pressure supply (P) port (viewed from the vacuum (V) port side) ZA Number of stations 01

Air Filter

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.

VNH

Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !1 Stainless steel Parallel pin !2 Refer to How to Order in page 17-4-32. Pilot solenoid valve 17-4-36

Metering Valve with Silencer Series ASN2

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

c

G 0.4 0.2 0.1 0.05 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature (oC) How to Order 1.2 Max. operating pressure (MPa) Metric size D 10 TLM0425 N 1.0 0.8 E Tubing designation Length per roll 0.6 F Symbol Type Length 10 20 50 10 m 20 m 50 m 0.4 Color indication G Roll Symbol Color 0.2 N R 100 Translucent 100 m 2S Red (Translucent) Straight 2 m 0.0 BU Blue (Translucent

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

LEY25: 200 or less LEY32: 100 or less 3. In case of [Double clevis], use the actuator within the following stroke limit. LEY16: 100 or less LEY25: 200 or less LEY32: 200 or less 4. G Head flange is not available for LEY32. Nil 1 3 5 8 A B C Without cable 1.5 3 5 8 !