3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) 7 8 47.5 2-4.5 (Bracket mounting hole) 15.5 20 25 49 4 L3 7 7 L Dimension n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10 206 198 184

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Single Unit) Metal/Rubber Seal, Body Ported, Plug Lead Unit Series VQZ100/200/300 Dimensions: VQZ200 Single unit Grommet (G): VQZ22(R)-G-C4/C6/M5 C4, C6, M5 C4: One-touch fitting for 4 2-3.5 mounting hole C6: One-touch fitting for 6 70 300 (Lead wire length) M5: M5 thread 22.5 29.5 19.3 R2.7 27 34 V100 A 11 15 SMC 2 8 Cover dia.1.6 Cross section 0.34 mm2 Manual override 3.5 20.5 SY 34 M3

VPA4

plate Retainer Spool valve Piston Spring Sub-plate Note Platinum silver Platinum silver Platinum silver No. q w e r t y u i Material Aluminium die-casted Aluminium die-casted Aluminium die-casted Brass Aluminum/NBR Resin Stainless steel Aluminium die-casted Platinum silver How to Order Sub-plate Replacement Parts Series Sub-plate Hexagon socket head bolt Gasket for sub-plate VP 00 2 3 P 1 M3

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

VQ4000

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2-G3/4 Step 3.

VQ5000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting screw (M4) Terminal block cover M3 screw Gasket 6 mm Electrical entry 2-G3/4 Step 3.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6 Flow Control Equipment Precautions Series ASN2 Handling of One-touch Fittings Caution Selection 1. Refer to page 15-1-11 for One-touch Fitting. Warning 1.

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .4, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in / 152 mm Height: 6.14 in / 156 mm

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .4, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in /

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152 mm Height: 5.91 in / 150 mm

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Pressure: 14.5 PSIG / 1 bar , 14.5 PSIG / 1 bar, Horsepower (60 Hz): .4, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in / 152 mm Height: 6.14 in / 156 mm , Length: 8.66 in / 220 mm,

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Pressure: 14.5 PSIG / 1 bar , 14.5 PSIG / 1 bar, Horsepower (60 Hz): .19, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 14.3 lbs. / 6.5 Kg Series Configured Datasheet.

Flow Rate: 5.6 CFM / 9.6 m3/hr / 159 LPM , 5.6 CFM / 9.6 m3/hr / 159 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .59, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 9.8 in / 249 mm Width: 6.14 in / 156 mm Height: 6.14 in / 156 mm

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .6, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 14.33 lbs. / 6.5 Kg Series Configured Datasheet.

Flow Rate: 4.2 CFM / 7.2 m3/hr / 119 LPM , 4.2 CFM / 7.2 m3/hr / 119 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .4, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 8.66 in / 220 mm Width: 5.98 in / 152 mm Height: 6.14 in / 156 mm

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Pressure: 11.6 PSIG / .8 bar , 11.6 PSIG / .8 bar, Horsepower (60 Hz): .59, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.

Flow Rate: 5.6 CFM / 9.6 m3/hr / 159 LPM , 5.6 CFM / 9.6 m3/hr / 159 LPM, Max Pressure: 8.7 PSIG / .6 bar , 8.7 PSIG / .6 bar, Horsepower (60 Hz): .59, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Item Dimensions: Length: 9.8 in / 249 mm Width: 6.14 in / 156 mm Height: 6.14 in / 156 mm , Length: 9.8 in / 249 mm, Width

Flow Rate: 7 CFM / 12 m3/hr / 198 LPM , 7 CFM / 12 m3/hr / 198 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .6, Voltage (60 Hz): 115, Voltage (50 Hz): 115, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 22.7 lbs. / 10.3 Kg Series Configured Datasheet.