SL5200

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 11 (ø3/8"), Sealant: S (w/Sealant)

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 11 (ø3/8")

Body Size/Type: 22 (Elbow Size 01, 02 Standard), Control Type: 1 (Meter-in), 1: 1, Thread Type: N (NPT), Port Size: 02 (1/4), Applicable Tubing O.D: 11 (ø3/8"), Sealant: S (w/Sealant)

SYJ300-OMU0003

No.SYJ300-OMU0003 SYJ Series S 904 3.57 JIS C 3306 0.5mm L M DIN ) (Z) 22 3 0.4Nm (DZ) (1.652.5N m) () NL: () () (3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y

Lock-Up Valve IL201/211/220 Series

How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C

S Couplers

Plug: Without check valve Socket: Without check valve KKA4S-02M-1 KKA4P-02M-1 40.2 KKA KKA KKA6S-04M-1 KKA6P-04M-1 76.0 KP How to Order LQ KKA 4 P M 02 MQR Built-in check valve Body size With check valve Nil -1 Socket/Plug designation 1/8 1/4 1/2 3/4 1 1 1/4 3 4 6 7 8 9 T Without check valve P S Plug Socket Note) KKA7/8/9 is not available without a check valve.

Exhaust Cleaner Series AMC

Thread type Nil R, Rc N NPT F G 1 4 Port size 02 Female Female Male Female Female Male 10 1 2 14 20 1 1 Male Male Male VEX 03 3 8 1 AN 04 1 2 06 3 4 AMC Specifications JIS Symbol Ambient and fluid temperature Fluid Compressed air 5 to 60C 0.1 MPa or less Element inlet pressure Noise reduction Oil mist removal 35 dB or more 99.9% or more How to Order Oil Bowl Assembly Drain cock (Standard

VXH

B 0 Normally Closed/Single unit Electrical option Nil None Port size S With surge voltage suppressor L With indicator light 02 03 04 Rc 1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

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I ~J' 20 24.5 zs -~ -eli Bracket View A Panel Mount Type Side dimensions for 418 panel mount type 0 40 21.2 , 6 8.5 36.0-5 >, D 0 . 1,16o;~1 ~ \ z 5-22-0 1 ZS-22-02 Thickness of the panel is 1 to 3.2mm. Panel mount adaptor A Panel mount adaptor B SMC CORPORATION 1-16-4 Shrmbashi. Mlnalo-kv.

SJ1000/2000/3000 Series

Implement measures to prevent any danger from occurring when operating the actuator. 11. Ventilation 2. Actuator drive When an actuator, such as a cylinder, is to be driven Provide ventilation when using a valve in a confined area, such as in a closed control panel.

SI unit for EtherCAT

No.EX-OMN0011-F PRODUCT NAME SI unit for EtherCAT MODEL / Series / Product Number EX260 Series Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Installation and Wiring 10 Installation 10 Wiring 11 LED Indication and Settings 15 Troubleshooting and Maintenance 21 Specifications 25 Specifications 25 Dimensions 27 Accessories 28 -1No.EX-OMN0011

SI unit for PROFINET

No.EX-OMO0030-E PRODUCT NAME SI unit for PROFINET MODEL / Series / Product Number EX260 Series Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product elements 9 Installation and Wiring 10 Installation 10 Wiring 11 LED Indication and Settings 15 Configuration 16 Troubleshooting and Maintenance 26 Specifications 31 Specifications 31 Dimensions 33 Accessories

Precision Regulator

Panel mounting 11 7. Troubleshooting 12 8. Dimensions 13 to 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Bacteria Removal Filter

Dimensions -11- Doc. No. SF-OMZ0013-B Revision history Rev. A : September, 2021 Add Carbon dioxide gas(gas) Delete Lubrication oil Rev.

FREE MOUNT CYLINDER

(mm) Operating direction 0. 3 0. 5 0. 7 1. 6 OUT 3 6 IN 21. 2 2. 86 7. 10 11. 3 3. 0 OUT 4 10 IN 66. 0 12. 9 26. 1 39. 3 5.9 OUT 6 16 IN 172 37.2 71. 8 106 5. 9 OUT 20 8 IN 264 58 111 164 11 OUT 25 10 IN 412 95 178 260 16 OUT 32 12 IN 691 173 312 420 Note) Prevent load from being applied to the piston rod when the piston rod is being extended. 6/10 2.

AW20-B to AW60-B

Note 11) Refer to Chemical data on page 90 for chemical resistance of the bowl. Note 12) A bowl guard is provided as standard equipment (polycarbonate). Note 13) A bowl guard is provided as standard equipment (nylon).

AFF

The lubrication grease for O-ring and gasket is changed to white vaseline. 11 Main Line Filter Series AFF How to Order AFF37B/75B AFF 37B 10 Body size Made to Order (How to Order and the applicable models are different from those shown on this page. Be sure to refer to Made to Order.)

02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings:?

Stacking manifold, DIN rail mounted, D-sub connector, plug-in type, Base mounted manifold, Valve stations: 02 to 10 as standard (11 to 20 requires manifold specform), One-touch fittings: C4, C6, N3, N7, 11 STA, MFLD, BASE, VALVE, SS5Y3 MANIFOLD SY3000, UM, SS5Y3 BUILT IN FITTING 1.10000 lb