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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QW printing QW 8150SZ Printed in Japan. D-G

9.8

OZ Edition B Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NR printing OZ 7150SZ Printed in Japan. D-DN

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2"), VALVE FOR TRANSMISSION

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Exhaust Cleaner Series AMC

Thread type Nil R, Rc N NPT F G 1 4 Port size 02 Female Female Male Female Female Male 10 1 2 14 20 1 1 Male Male Male VEX 03 3 8 1 AN 04 1 2 06 3 4 AMC Specifications JIS Symbol Ambient and fluid temperature Fluid Compressed air 5 to 60C 0.1 MPa or less Element inlet pressure Noise reduction Oil mist removal 35 dB or more 99.9% or more How to Order Oil Bowl Assembly Drain cock (Standard

Quick Exhaust Valve Series AQ

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DC: Can be attached to Grommet, Conduit, Conduit terminal. 3 8 03 CE-compliant: Electorical entry is applicable only for the DIN terminal.

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

.); Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2")

.); Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2")

.); Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2")

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F N2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) 2 2 2 () 00.5 01 03 -0.50.5 -11 -33 1 L/min L/min L/min L/min L/min L/min 2F.S. 3 2F.S.(1535 ) (25) 5F.S.(050 ) 2F.S.(0300 kPa) 5F.S.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H

VN-OMP0002

No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C.