Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch.

CJ2X/CUX/CQSX/CQ2X/CM2X

Vertical Operation 1 2 P2 W A P1 a (b) (a) P0 P0 a A W (1) The speed is controlled with meter-out control. When the meterin controller is used in conjunction with the meter-out controller, lurching is reduced. () (2) Depending on the size pf the load, installing a regulator with check valve at position (a) can decrease lurching during descent, and operation delay during ascent.

Microspeed Cylinder

1) If connections are reversed on a 2 wire type switch, the switch will not be damaged if protected by a protection circuit, but the switch will be in a normally ON state.

Filter Regulator

Rc Rc C3LF-8J-A C3LF-8-A G G C3LFF-8J-A NPT C3LF-8(Z)-A NPT C3LFN-8J(Z)-A Appearance and part No. C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port thread ty pe (9) Part No. (9) Part No. thread ty pe Rc Rc AD37-2-A AD37-D G G NPT AD37N-2(Z)-A NPT AD37N(-Z)-D Appearance and part No.

A-HEC-OM-J004

Tank A tank with an inside diameter of 130 and a maximum fluid level of 188mm. 2.1 Liquid Tank/Controller 2-2 A_HEC-OM-J004-4 Chapter 3 Composition and Function of Product Chapter 3 Composition and Function of Product 3.1 Composition The Thermo Electric Bath consists of a Liquid Tank with built-in thermo-modules and a Controller with a built-in DC power supply to actuate the thermo-modules

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SGH(A)32-7020 SGH(A)42-7025 SGH(A)13-3010 SGH(A)23-3015 SGH(A)33-3020 SGH(A)43-3025 SGH(A)13-7010 SGH(A)23-7015 SGH(A)33-7020 SGH(A)43-7025 3/8 7.5 42 (1.8) 1.4 1.5 1/2 9.4 65 (2.7) 2.4 2.6 7 MPa 2-port 3/4 12.4 112 (4.7) 4.7 5.3 1 15.4 155 (6.5) 6.6 7.2 3/8 9.4 50 (2.1) 56 (2.3) 1.6 1.7 11 1/2 10.5 55 (2.3) 73 (3.0) 1.6 1.7 3 MPa 15 3/4 12 90 (3.8) 92 (3.8) 2.6 2.8 17 1 15.2 135

High-precision Digital Pressure Switch

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -39No.PS-OMV0009-E [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Ｍ icro Mist Separator Regulator

Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (9) includes Bowl seal (8). Refer to section [12. Disassembly Drawing] (P38).

Mist Separator Regulator

Rc G Rc G AD27-6C-A AD27-6-A NPT AD27-6C(Z)-A NPT AD27-6(Z)-A C Note 1) Option symbol 2 Semi-standard symbol Semi-standard: 2 Piping port thread ty pe (9) Part No. Rc G NPT AD27-2(Z)-A AD27-2-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (9) includes Bowl seal (8). Refer to section [12. Disassembly Drawing] (P38).

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -36No.PS-OMV0004-H [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

FILTER REGULATOR

Applicable tube D.O. 10 NPT3/8" 18 Option Note 2 Note 2 Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Part no. Port thread Rc Rc AD48-A AD48-2-A G G NPT AD48N(-Z)-A NPT AD48N-2(Z)-A Semi-standard 6 External B B Port thread Part no. appearance Rc drawing and AD48-6-A part no. G NPT AD48N-6(Z)-A Applicable tube D.O.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

FILTER REGULATOR

Rc Rc C4LF-8J-A C4LF-8-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A B B External appearance drawing and part no. 1/4 HEX17 Option Note 2 Note 2 Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Part no.

HRX-OM-K003

Do not connect the cable with the factory side at this point. 2. Turn OFF the main breaker of this system. 3. Undo the screws (2 pcs.) to remove the front panel. Be sure to use a Phillips screwdriver. 4. Undo the screws (2 pcs.) to remove the breaker cover. Be sure to use a Phillips screwdriver.

155

2 1 A 05 G 10 1 T Z B1 A L S X1 q w e r t y u i o !

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

Air Filter

Rc C2SF-6J-A Rc C2SF-6CJ-A G C2SFF-6J-A G C2SFF-6CJ-A NPT C2SFN-6J(Z)-A NPT C2SFN-6CJ(Z)-A Option symbol 2 2J Semi-standard symbol Semi-standard: 2 Semi-standard: 2J Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc C2SF-2J-A C2SF-2-A G G C2SFF-2J-A Appearance and part No.

Micro Mist Separator

Semi-standard: "6C" Standard Port thread Part No. type Rc AD27-6C-A G Rc AD27-6-A G NPT AD27N-6C(Z)-A NPT AD27N-6(Z)-A Option symbol C Note 1) Semi-standard symbol 2 Semi-standard: "2" Standard Port thread type Part No. Rc AD27-2-A G Appearance and part No. NPT AD27-2(Z)-A Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. includes Bowl seal . Refer to [11.

Mist Separator

Semi-standard: "6C" Standard Port thread Part No. type Rc AD27-6C-A G Rc AD27-6-A G NPT AD27N-6C(Z)-A NPT AD27N-6(Z)-A Option symbol C Note 1) Semi-standard symbol 2 Semi-standard: "2" Standard Port thread type Part No. Rc AD27-2-A G Appearance and part No. NPT AD27-2(Z)-A Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. includes Bowl seal . Refer to [11.

Line filter

Semi-standard: "6C" Standard Port thread Part No. type Rc AD27-6C-A G Rc AD27-6-A G NPT AD27N-6C(Z)-A NPT AD27N-6(Z)-A Option symbol C Note 1) Semi-standard symbol 2 Semi-standard: "2" Standard Port thread type Part No. Rc AD27-2-A G Appearance and part No. NPT AD27-2(Z)-A Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. includes Bowl seal . Refer to [11.