Large Type Vacuum Unit Series ZR SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure
Not required. a=3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 45 for deflection data. 2 Series LJ1H10 Dimensions/LJ1H10PB 10 6 Work piece mounting reference plane 80 5H10 depth 8 8 x M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 60 50 (43) Stroke + 125 (table movement range) 232 Z section 3.3 30 90 83 A section
140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator
AP100 Port size B 2 1/4 3 3/8 Note) EXH port: 1/4 Built-in regulator EXH port: M5 Solenoid valve EXH port: M5 L-bracket C * Bracket is included. 957 ITVH2000 Series Standard Specifications Model ITVH2000 Minimum supply pressure Whichever is higher: 0.5 MPa or the set pressure + 0.2 MPa Maximum supply pressure 3.0 MPa Set pressure range Note 1) 0.2 to 2.0 MPa Power supply Voltage 24 VDC 10%
The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.
15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5
x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port
R1/8 (M5 female threaded) Option 2 ISG Nil None Bracket A N01 NPT1/8 (M5 female threaded) ZSM1 Straight type A1 C4H One-touch fitting 4 mm, 5/32 inch C6H One-touch fitting 6 mm Bracket B N7H One-touch fitting 1/4 inch A2 Elbow type C4L One-touch fitting 4 mm, 5/32 inch Bracket C C6L One-touch fitting 6 mm A3 N7L One-touch fitting 1/4 inch Panel mount adapter Unit specifications Option 1 With
10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4
D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Except deflection of guide rods ( ) 0.06 0.05 0.04 0.04 0.04 Ball bushing bearing CX Piping port size Rc 1/4 M5 x 0.8 Rc 1/8 DStandard Stroke -X Bore size (mm) Long stroke (mm) Standard stroke (mm) Model Bearing type 20JIS Symbol 20 25 32 75, 100, 125
(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23
(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23
Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit : torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 7-1 Required screws All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). 25 No.EX##-OMY0004 7.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.
Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP
Mounting dimension in axial directions Size Tap depth for the Tap depth for the top Bolt bottom mounting mounting 1 8 4 M4 3 8 7 M4 7 10 7 M5 20 11 7 M6 Vertical mounting body through hole Body side mounting body through hole Table 9. Mounting dimension in body side Size L Bolt 1 38 M4 3 44 M4 7 50 M5 20 59 M6 28 Piping Fig. 4 and Table 10 show port position and size.
Hexagon socket Head cap screws M4x10 Protection cover Attachments Hexagon socket Head cap screws M3x7 Air gripper JMHZ2-16D* Auto switch D-M9 Positioning pin3x6 O ring5x3x1 ISO9409-1-31.5-4-M5 Compliant Adapter plate. For opening the finger (O) Speed controller JAS-LEB04-M5 For closing the finger(S) Speed controller JAS-LEA04-M5 Hexagon socket head cap screwM4x20 5 - 3.
Hexagon socket Head cap screws M5x10 Positioning pin3x6 ISO9409-1-31.5-4-M5 Compliant Adapter plate. O ring5x3x1 For closing the finger(S) Speed controller JAS-LEA04-M5 For opening the finger (O) Speed controller JAS-LEB04-M5 Hexagon socket head cap screw M6x10 Hexagon socket head cap screwM4x20 Positioning pin5x10 Positioning pin6x10 ISO9409-1-50-4-M6 Compliant Mounting flange. 5 - 3.
M3 M5 01 N01 R04 R06 IM5 IM5H M5 female M5 female Port size M3x0.5 M5x0.8 R1/8 NPT1/8 M5x0.8 4 6 thread, thread, through M5x0.8 reducer reducer through type (with type mounting hole) Case Resin case: PBT Fitting: C3604BD PBT Resin case: PBT Resin case: PBT Fitting: SUS303 Fitting: A6063S-T5 Material Pressure sensing section Pressure sensor: Silicon, O-ring: NBR Oil resistance vinyl cabtyre
torque Nm (mm) MHF28D M3 x 0.5 0.63 4 MHF2-12D M4 x 0.7 1.5 5 MHF2-16D M5 x 0.8 3 5.5 MHF2-20D M6 x 1 5.2 6 Screw-in depth Model Bolt Max. tightening torque Nm (mm) MHF28D M2.5 x 0.45 0.36 4 MHF2-12D M3 x 0.5 0.63 5.2 MHF2-16D M4 x 0.7 1.5 MHF2-20D M5 x 0.8 3 When MHF2-8D* and MHF2-12D* are mounted body through-hole, use the attached special bolts.