XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Lock unit

Chamfer Chamfer (1) For male thread (2) For female thread 30 30 D-2 D-2 D D Fig. 2 Rod end style Do not apply excessive lateral load or external force to the lock unit. They may break the lock unit. Do not use the product in applications where the rod rotates. Do not apply loads with impact, strong vibration or rotational forces while the lock mechanism is activated.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Hs Reed switch D-A44 A A 49.5 Auto switch 19 Series CH2E/CH2F/CH2G/CH2H JIS Standard Hydraulic Cylinder Double Acting: Single Rod Auto switch mounting height Unit: mm D-B5/B6 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL D-G59F/G5NTL D-F5/J5 D-F5W/J59W D-F5BAL/F59F D-F5NTL D-A5/A6 D-A59W D-A3 D-G39/K39 D-A44 Bore size (mm) Hs Ht Hs Ht Hs Hs Hs CH2E 35 29.5 35 29.5 33.5 CH2F 34.5 30 34.5 30 32 32

I/O Configurator (NFC version)

R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).

Plug-in/Plug Lead: Single Unit

Note) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP block plate EXH block plate 18.5 20.2 VVQ5000-16A-1 VVQ5000-16A-2 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passage blocked

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

brackets A and D.

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Rotary Cylinder Series MRQ

Description No. r i !

Thermo-chiller

SMC Thermo-chiller Variations Set temperature range [C] Environment Cooling capacity [kW] Series Temperature stability [C] International standards 1.2 1.8 2.4 3 4 5 6 9 10 15 20 25 28 HRSE Basic type 2.0 10 to 30 V V V Indoor use (Only 230 VAC type) 1.6 kW 2.2 kW HRS Standard type 0.1 5 to 40 V V V V V V V Indoor use (Only 60 Hz) Indoor use Electrical box: IP54 HRS-R Environmentally resistant

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

Dedicated Controller

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

R

E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N353 DETAILS OF YOUR LOCAL SALES OFFICE 1.208 ROTARY ACTUATORS RACK & PINION TYPE SERIES NCRA1 D I M E N S I O N S W I T H O U T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW30 D I M E N S I O N S W I T H O U T A U T O S W I T C H D O U B L E R O D E N D NCRA1BW50~100 L G H J K L M N

13

Effective area of tubing Effective area of tubing from graph below Tubing O.D. 9 V x 60 Q Adsorption response time T1 = Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) T1 : Arrival time to 63% of last vacuum pressure Pv T2 : Arrival time to 95% of last vacuum pressure Pv Q1: Average adsorption flow l/min (ANR) D : Piping diameter (mm) L : Length from

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

In-line D-M9N D-M9P D-M9B D-M9NA D-M9PA D-M9BA Electrical entry Special function Wiring (Output) Indicator light Applicable load Smbol A B C E F G 3-wire (NPN) 3-wire (PNP) 2-wire Relay, PLC IC circuit 24 V 5 V, 12 V Grommet Yes 12 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 24 V 5 V, 12 V Relay, PLC IC circuit Water resistance (2-color display) Grommet 12 V Option (For detail, refer to page

NCRAI seies

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

For detailed specifications, please contact SMC. 100 V Relay, PLC Yes 100 V, 200 V 12 V 24 V (B54) B54 B73C 2-wire 12 V C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF PLC Grommet G79 (B59W) Diagnostic indication (2-color indication) IC circuit 3-wire (NPN) 3-wire (PNP) 5 V, 12 V K79 Grommet 2-wire 12 V K79C Connector Relay, PLC Yes 24 V IC circuit 3-wire (NPN) 3-wire (PNP)

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

V V V 100 V 93A Oilproof heavy-duty cord V V V M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V S79 V V v v IC circuit 3-wire (PNP) S7P V V v v Solid state auto switch For 20, 30, 40 Grommet Yes Oilproof heavy-duty cord Relay, PLC 2-wire 12 V T79 V V v v Connector T79C V V V