Cylinder with Lock Series CNS

CLQ Bore size (mm) 125 140 Tie-rod nut Socket Width across flats RLQ JIS B 4636 + 2 point angle socket 22 JIS B 1181 Class 2 M14 x 1.5 22 MLU JIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 5. When restarting, control the switching signal for the unlocking solenoid valve so that it acts before or at the same time as the cylinder drive solenoid valve.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

VXD21/22/23

Series VXD21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)

VXR21/22/23

Series VXR21/22/23 Construction/Principal Parts Material Normally Closed (N.C.) Normally Open (N.O.)

REA/REB

64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Silencer Series AN

AN Model AMC A B D Dimensions (mm) Model Port size R Recommended flow (m3/min (ANR)) Weight (g) Effective area (mm2) 10 15 35 60 1 2 Flow Characteristics (Initial conditions) 1 8 AN203-02 1 4 AN303-03 3 8 25 84 25 22 AN403-04 AN103-01 0.8 or less 1.0 or less 2.0 or less 4.0 or less 1 23.5 11 3 36 16 14 17 66 22 19 AN103 to 403 1 Construction/Parts/Dimensions 0.5 Inlet pressure (MPa) Noise

Electric Actuator

) 20.2 (90) 3.82 (17) 10 14 22 30 10 14 27.0 (120) 40.5 (180) 8.99 (40) 6.29 (28) 6.29 (28) 8.99 (40) 29.2 (130) 12 29.2 (130) 47.2 (210) Note) ( ): Long stroke Features 8 Controller Controller Step data input type For step motor Step data input type For servo motor Programless type Pulse input type Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control motor Control

Check Valve Series AK

16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

VQ7-6/7-8

25 (R1, R2) 2-3/8 P R2 R1 VK A B 14 11 VZ 38 50 62 50 62 A 12 9 VF R2 R1 P (L 500) Cable with connector B A 2-1/8 13 13 VFR Mounting hole 2-6.5 42.5 42.5 34 34 Indicator light Bottom ported drawing (P , A, B) 3-1/4, 3/8 VP4 VZS SMC VFS 93 14 (A, B port) VS4 12 25 (X port) Y 5 3 37 25 VQ7 22 14 1 EVS X(PE) port 1/8 A, B port 2-1/4, 3/8 25 25 9 Y(PE) port 1/8 R1, R2 port 2-3/8 P port 1/4,

OMS0020

Software Specifications . 11 5.1 Serial Communication Specification . 11 5.2 Frame Format . 12 5.3 Command List . 14 5.4 Command Details . 15 (1) Step Data Setting Command "EE" Details . 15 (2) Step Data Save Command "EU" Details . 22 (3) Step Data Reflection Command "AB" Details . 22 (4) Monitor Command "MO" Details . 23 (6) Details on Operation Command "OE"Details . 26 (7) Alarm History

Precision Cylinder Series MTS

0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02 12 Width across flats 14 With end lock 3 124.5 + Stroke

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

CV/MVGQ

Data 3 x 18l Polished round 12 Polished round 16 Polished round 20 Polished round 24 Polished round 12 Polished round 18 Polished round 20 CDP-3A CDP-3A NT-04 NT-05 NT-08 NT-10 3 x 18 3 55.5 3 47.5 4.0 55.5 47.5 M14 x 1.5 22 25.4 4 8 21 0.050 0.093 0.050 0.093 12 12 40, 50, 63 80 100 4 x 25l CVD-06 CDP-5A 4 x 22 4 75 4 65 5.0 76.5 66.5 M18 x 1.5 5 11 27 31.2 26 0.050 0.093 0.050 0.093 16

Rotary Table

Bearing Body Inside of cylinder Fig. 22 Pay attention to the direction of the piston seal and wear ring (size 50 only).

KN Series Nozzles for Blowing

22 17 17 17 17 17 17 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 4 6 4 6 4 6 35 D H2 H1 L1 A 8.5 Reference dimensions after R thread installation.