flow rate Note 8) (50/60 Hz) (l/min)Power supplyApplicable ground fault circuit interrupter capacity Note 9) (A)Rated operating current (50/60 Hz) (A)Rated power consumption (50/60 Hz) (kW)Remote operation signal inputOperation signal outputAlarm stop signal outputAlarmHRG010Air-cooled refrigerationR407C (HFC)Refrigerator ON/OFF controlTemperature: ?

Note 2)Circulating methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

Note 2)Circulating methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

Note 2)Circulating methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

Note 2)Circulating methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

Note 2)Circulating methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

Note 2)Circulating methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

PSxx-OMG0001CN

050 -1060 () 3585RH() AC1000 V 1 50 M(DC500 V) 0.5%F.S. (25 ) PSE35P4PPSE3T PBTPBT(PSE3)PPE(PSE3T) PSE385 g PSE330 gPSE3T50 g 5 4.1 2 m 2 0.2 mm 1.12 mm CEUL/CSARoHS [mA] [V] A B E 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 0100 kPa 0 100 kPa -10 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa C D F 02 kPa 0 2 kPa -0.2 kPa -32No.PS-OMG0001CN-H 4

PF2x7.eng

Metal piping attachment PF2A710 2 Item 24 mm Default setting ( ) PF2A750 Item Default settings Hysteresis 1 Hysteresis 1 Set point 1 Set point 2 1 DC(+) 50% of max. rated flow [n_1] Input of the Set point 1 (OUT1) Selection of display mode [d_1] Display instantaneous flow PF2A711 ON Body 50% of max. rated flow 2 OUT2 [n_2] Input of the Set point 2 (OUT1) [F_1] Input the Set value of instantaneous

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

methodTemperature range setting Note 1) CCooling capacity Note 3) (50/60 Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

0 10 20 30 40 50 F1 Gripping point L (mm) Gripping point L (mm) F1 F1 532 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Construction q !

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

/60 Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

Dedicated Controller Series LC1 Uniaxial Type

Note 2) The power supply for model LC1-1B3H2 is 200VAC, 50/60Hz. 52 Dedicated Controller Series LC1 Performance/Specifications General specifications Model LC1-1B1 LC1-1B2 Item 100V/110VAC10% 50/60Hz 200V/220VAC10% 50/60Hz (LC1-1B3H2 is 200VAC10%) Power supply 5mA or less Leakage current 80 x 120 x 244mm Dimensions 2.2kg Weight Single unit installation type (resin housing) Housing type Actuator

Air Cylinder NCM Series Stainless Steel Cylinders

40-140'F(5-m'c 2 -20 inch/sec {50 -500 mm/sec) 2 -30 jnch/sec (50-750 mm/sec) Not required (prelubricated at factory) Standard Stroke LLst Owhen mounting, completelyflush the piping and be careful that dust and chips do not erterthe cylinder. )Load of piston rod should always be aligned parallel with the cylinder axis.

Electric Actuator with Integrated Guide Series LTF

P N 1 2 0 100V AC 50/60Hz Ground ball screw Photo micro sensor 3 pcs., Photo micro sensor rail 1 pc. 200V AC 50/60Hz Rolled ball screw Proximity switch (A contact) 1 pc., Proximity switch rail 1 pc. Without motor Proximity switch (A contact) 2 pcs., Proximity switch rail 1 pc. Motor/switch entry direction Proximity switch (B contact) 2 pcs., Proximity switch rail 1 pc.

Ejector Valve Unit, Series ZYY/ZYX

Nil 0.6m 30 3m 50 5m Example) ZSE1-00-15CN-X129 1pc. ZS-20-5A-50 1pc. 5 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Internal Circuits and Wiring Examples 1. Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

IDX-OM-W093

1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50

IDX-OM-W026

10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50