PSxx-OMF0005CN

0.50.6Nm 912 mm (G1/2) M3 0.50.6Nm 0.50.6Nm + M3 0.50.6Nm A-A () -9No.PS-OMF0005CN-E * 30 * 1 2 3 O 4 (0.40.5 Nm) (AR ) * 0.020.2 MPa 0.2 MPa 0.2 MPa ([]) ([] ) ()60mm -10No.PS-OMF0005CN-E N P R 1 IISA2 C S L 6 5 D E 2 IISA2 *1 16 1~6 C +2 *2 *A V 2 E2 (MPa) 0.2MPa 0.4MPa G2 (MPa) *P2 (MPapsi) SR *Z2 (psi) SL E4 (MPa) PR G4 (MPa) PL *P4 (MPapsi) * *Z4 (psi) * *1psi *21

3/5 Port Solenoid Valve

(VV3K3-21): Body ported (A port top ported) 10 VK300-OMH0002-C VK300/3000 Series Specific Product Precautions 4 Be sure to read this before handling the products.

EX500-GPR1A.eng

EX9-PE1 21.2 59.8 43.2 80.3 22.2 21 26.7 PWR PWR L dimensions The mounting and removing methods of each SI unit are as shown below.

Air Preparation Equipment

Specifications 5 Model 7 Note2) FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Number of elements 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 28 65 x L250 Stainless steel 304 Stainless steel 304 28 65 x L250 7 Note2) 14 65 x L250 7 Note2) 21 65 x L250 7 Note2) 65 x L500 65 x L750 65 x L1000 65 x L500 65 x L750 65 x L1000 Element size Cover Case O-ring

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

Modular Type Regulator Series AR

28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19 21

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 14 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 NDH10 U1 NX R1 Part no. +0.048 0 Y-J010SUS 3.3 3.2 8 10 +0.048 0 Y-J016SUS 5 6.5 12 10 Rod end cap T-bracket

End Lock Cylinder Series CBJ2

28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3 9.5 0 -0.3 18.3 15 8 21 33

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100

Electric Actuator Triple Axis P&P Unit

Confirm there is no rattle on the pulley cover. 21 Electric Actuator/Maintenance Guide 6 Be sure to read before handling. Motor Mounting X Y Z Applicable model LG-240ZMotor assembly instructions Motor Assembly Procedure 1. Remove the four bolts on the top cover. 4. Mount the motor on the mount block. At this time, be sure to take measures against loosening.

3 Way Direct Acting NVKF 300 Series

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

Air Pilot Operated Series NVSA

DIMENSIONS a o 5.30 (137) 4.80 (1e) 2.13 (s) 2.36 (60J 3.27 (33) 3.23 182) r.06 (21! 0.35 (9) 5.51 t140) 2.52 t&) /62\ 3.31 ,ll 3.58 (91) 1.06 tzn 0.t9 (10) 7.28 (186) (1661 2,83 (721 2.99 (76) 386 (s) 4.29 009) (31) 112) 63d3drd.r.i r3s.15,(.)rrr.i r.'

3 Way,3 Port Solenoid Valve NVZ Series

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Port Direct Operated Poppet Solenoid Valve SeriesVKF300 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Series VKF300 Compact with large flow rate Body width 18mm Cv0.25 (Standard: Base mounted type) Cv0.20 (Standard: Body ported type) Various manifold piping directions Output port: Manifold set-up allowing 360 rotation of 2(A) entry direction (in 90 increments) Types 20 and 21

Rotary Cylinder Series MRQ

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size Y 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

CV/MVGQ

Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 11 4 7 8.1 3.2 12.7 M8 x 1.0 M4 x 0.7 SNJ-016B NTJ-015A 14 4 8 9.2 4 16.2 M10 x 1.0 M5 x 0.8 NDd9 NDH10 R1 NX U1 Part no. ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9