Pressure Sensor for General Fluids

PSE560 PSE561 PSE563 PSE564 Rated pressure range 0 to 1 MPa 0 to -101 kPa -100 to 100 kPa 0 to 500 kPa Extension analogue output range -0.1 to 0 MPa 10.1 to 0 kPa -50 to 0 kPa Withstand pressure 1.5 MPa 500 kPa 500 kPa 750 kPa Model No.

Coolant valve

Light/Surge Voltage Suppressor (Pilot valve: VO307) -11 Electrical wiring -11 Troubleshooting -12 -1SGC200-OMM0002-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net Weight Part No. 20 CM20Z-PS 5g GR-L-005 25 CM25Z-PS 10g GR-L-010 32 CM32Z-PS 150g GR-L-150 40 CM40Z-PS 11 3-2-2. CQSY, CQ2Y Series When malfunction due to air leakage of a cylinder occur, please replace with the below seal kit. C a u t i o n For installation and removal, use an appropriate pair of pliers (tool for installing a C type retaining ring).

XLG Series

55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

M Body Size Model A B C D E F G H I J K L M N ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 15.5 14.4 8.5 50 15 12.5 24 17.5 26 53 22.5 48 Metric size Inch size Collar part arrow 15.2 6 8 17.5 16.6 9.5 61 16 13.5 27 19.5 28 65 24.5 52 Transparent cover 57 8 10 18 18.5 11 21.5 65 29.5 21 17 69.5 27 14.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 19.7 17.7

ISA2

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Throttle ZSP 2 port solenoid valve ISA2 Spacer Regulator Y20 IS ZSM Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized wiring/Supply port right) PF2 IF IN Data Spacer Y20 Seal for additional station ISA-7-B End plate L ISA-6-A End plate R ISA-6-B ISA-7-A When

VXP21/22/23

Dimensions (Orifice Size: 10 mm) Normally Closed: VXP2130 Grommet: G Conduit: C (67) (52) 20 23 (67) (52) 20 39 270 10 290 10 G 1/2 VC (5.5) (2.3) (2.3) (5.5) VDW 80 86 63 69 66.5 73.5 80 86 71 77 (33) 36 (33) 36 (27) 30 VQ (7.5) (27) 30 (7.5) Bracket 11 14 11 14 VX2 IN OUT IN OUT Bracket 24 26 50 2-Rc 1/4, 3/8, 1/2 (28) (28) 24 26 50 2-Rc 1/4, 3/8, 1/2 VX 22 28 40 22 28 Courtesy of Steven

Series CA2 10-/11- 21-/22- Air cylinder ø40, ø50, ø63

-/22-CA240 11-/22-CA250 11-/22-CA263 Relief type 50, 75, 100, 125, 3/8 Non-lube Double acting, single rod Air cushion Available 150, 200, 250, 300, 1/4 Vacuum suction type 350, 400, 450, 500 3/8 Note) Consult SMC for long stroke.

Modular Type Air Filters Series AF

If unit is to be used in a washdown application, avoid directing fluid into the exhaust port. 10 Accessories Spacer Dimensions mm Epoxy Coated Aluminum, Stainless Screws, NBR Seals Model A Y20-T4 Y30-T4 Y40-T4 10 11 14 F.R.L. center Interface With T Bracket Interface with T-type bracket T-type bracket Epoxy Coated Aluminum, Stainless Screws, NBR Seals G F.R.L.

2/3 Port Valve for Various

: D VXA 59 47 Cable 6 to 12 VN LVC LVA LVH (2.3) (7.5) (5.5) 34.5 (44) 80 86 LVD 63 69 (33) 36 (27) 30 LVQ G 1/2 IN 11 14 22 OUT LQ Hexagon width across flats Bracket 24 26 50 (52) (28) 2-Rc1 /4, 3/8, 1/2 22 28 LVN 40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

V100-49-15 D V115 Light/surge voltage suppressor Rated voltage Nil Without light/surge voltage suppressor With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) S Z 5 24 VDC 6 12 VDC Cable length 1 100 VAC 50/60 Hz 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 2 200 VAC 50/60 Hz DOZ is not available.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

CUJ

RQ MU DSpecifications Dimensions -X 11 3.5 The specifications are the same as those for the standard double acting type.

PSxx-OMG0005CN

(24 V ) 100 (12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S

POWER CLAMP CYLINDER

(mm) Shim thickness (mm) 0.3MPa 0.3MPa Recommended shim thickness Recommended shim thickness 0.5MPa 0.5MPa 0.7MPa 0.7MPa 8 - 63 Arm length L100mm Arm length L150mm 4000 4000 Peak clamping force position Peak clamping force position 3500 3500 3000 3000 0.7MPa 0.7MPa Clamping force (N) Clamping force (N) 2500 2500 2000 2000 0.5MPa 0.5MPa 1500 1500 0.3MPa 0.3MPa 1000 1000 500 500 0 0 0 0.5

Clean Room Rodless Cylinder Series CYP ø15, ø32

Slide table Note 4) The plots indicate the 95% upper reliability limit value for time series data up to 500 thousand operation cycles. (Cylinder: CYP32-200, Workpiece weight: 5 kg, Average speed: 2000 mm/s) Note 5) The data above provide a guide for selection but is not guaranteed.

MB1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Precision Regulator

IR IR IRV VEX SRH Relief flow rate characteristics SRP Possible to relieve (exhaust) air ranged 50 to 4000 L/min (ANR) SRF Back pressure: 0.7 MPa Back pressure: 0.7 MPa ITV 0.7 IR2010 IR201 0.7 IR3010 IC 0.6 0.6 IR401 Set pressure (MPa) Set pressure (MPa) 0.5 0.5 ITVH 0.4 0.4 ITVX 0.3 0.3 PVQ 0.2 0.2 0.1 0.1 VY1 600 500 400 300 200 100 0 5000 4000 3000 2000 1000 0 VBA VBAT Relief flow (L/