MLGP

22 6.6 8.6 8.6 1/8 1/4 1/4 18 38 47 55 30 40 50 104 200 200 200 44 60 70 11 14 14 13 9 14 118 146 158 7.5 9 9 24 24 28 86 110 124 106 130 142 48 48 52 72 92 110 300 300 300 40 50 63 M8 x 1.25 M8 x 1.25 21.5 130 M10 x 1.5 M10 x 1.5 28 130 M10 x 1.5 M10 x 1.5 WB Bore size (mm) X XA XB YY YL Z XC XL st25 25

MLGP

22 6.6 8.6 8.6 1/8 1/4 1/4 18 38 47 55 30 40 50 104 200 200 200 44 60 70 11 14 14 13 9 14 118 146 158 7.5 9 9 24 24 28 86 110 124 106 130 142 48 48 52 72 92 110 300 300 300 40 50 63 M8 x 1.25 M8 x 1.25 21.5 130 M10 x 1.5 M10 x 1.5 28 130 M10 x 1.5 M10 x 1.5 WB Bore size (mm) X XA XB YY YL Z XC XL st25 25

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 4 4 18 10.4 10.4 14 13 M 6 10 10 19.5 12.8 12.8 14 8 A L 4.2 8 17 15.2 18 26 21.5 15.2 (R) 10 19 18.5 29 41 24 18.5 Connection threads H 12 22 20.9 46 58 25 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

VT307

100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 1 2 3 VQ Light/Surge voltage suppressor 50 60 50 60 Nil None 50 60 4 VKF With surge voltage suppressor (Grommet type is only available.)

EXxx-OMV0017-D

Remote units 0 / 15 / 31 / 63 / 127 Remotes (EX600-WEN#) 0 / 15 / 31 units (EX600-WPN#) 15 Remotes DA refresh time(sec)*1 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s *1 The analog input update time is set for every Wireless Remote unit. Refer to "3.3 Remote setting".

HAA

Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source IDG 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz AMG Power consumption (W) Compact size and lightweight Uses minimal floor space Built-in drain separator

LEC-OM005xx

enable switch (option) Cable length 3 meters Enclosure IP64 Weight 350g (excluding the cable) Operating 5 to 50 deg.C. temperature range Operating humidity 90%RH or less (no condensation) range Storage temp. -10 to 60 deg.C.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Cnannel 11 Disable Clears the ON/OFF counter to 0. 1: Could be incorrectly recognized as short circuit depending on used load (ex.: lamp load).

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

Free Mount Cylinder for Vacuum Series ZCUK

(mm) Operation Range 20 Bore size Auto switch model 10 6 16 9 25 12.5 32 14 D-A9, A9V D-M9, M9V D-M9W, M9WV 11 7 4 5 7 7 Since this is the average value at a normal temperature including hysteresis (tolerance 30%), it is not guaranteed.

End Lock Cylinder Series CBG1

63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ 20 +0.08 0 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8 4 0.5 5.5 15 118 25 5.5 8 M10 x 1.25 15 29 1/8 11

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

POWER CLAMP CYLINDER

Arm angle [] Bore size [mm] 15 30 45 60 75 90 105 120 135 0 0 0 0 0 0 0 0 0 75 90 105 120 135 50 15 30 45 60 -3 -4 -5 -5 -5 -5 -5 -6 -9 1 0 0 0 0 0 0 0 0 75 90 105 120 135 63 15 30 45 60 -3 -4 -5 -5 -5 -5 -5 -6 -9 (7) Do not disassemble the power clamp cylinder. The power clamp cylinder consists of a completely sealed structure in order to protect it from welding spatter.

Title not found

(66) 1 m 1 3 8 {35) 3.98 o 0 1 ) 3.35 (85) 2.52 (64) 0.79 (20) 1 5 7 1.57 (40) 4 6 9 ( 1 1 9 ) a 0 2 (102) 3.07 (73) 0.94 (251 2.05 (52) 0.83 121) M12x1.Ts 0..11 ( 1 i ) 0 6 7 117) M22x1.5 1.46 (37) ( 1 1 6 ) 4.02 (102) 0.53 0 7 1 (18) 5 . 1 2 (130) 2.99 (76) 6.30 (r 60) 2 8 0 (71) 8 0 3 (204) t.I 5 (80) 2.56 (65) 0.95 '21.51 L 1 5 (e0) E 1.57 524 4 5 7 3 6 2 1 . 1 8 2.05 0.83 M12x1.75 )

Thermo-chiller Basic Type HRSE Series

C 10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating uid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated ow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid

Soft Start-up Valve

64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 9 AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 1 Be sure to read this before handling the products.

Soft Start-up Valve

64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 9 AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 1 Be sure to read this before handling the products.

EXxx-OMU0020CN

LED . 59 8.6. . 60 9. EX245-EA2-1/2 . 61 9.1. . 61 9.2. . 62 10. . 63 10.1. . 63 10.2. Y . 64 10.3. (M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

Rotary Table

Special tool dimensions [mm] Part number A B C D E P8910195 50 10 16 10 12 P8910295 60 12 18.2 11 14 P8910495 80 15 24 17 19 Special tool Fig. 7 -33- Piping Figure 8 and Table 12 show locations and sizes of piping ports. Ports can be selected from two sides. Plug the ports that are not used. Table 12.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Display item), Set value (Threshold value) Sub screen Set value (Threshold value) Hysteresis value Visualization of settings Peak value Bottom value Delay time Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ1/TSJ2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 p. 9 ZSE20A(F)/ ISE20A 2 outputs Analog output (Voltage/Current) IP40 p. 11